Calibration Targets

- Stage Micrometers and Concentric Squares for Calibrating Distances
- Allows for Precise Measurements of Enlarged Images
R1L1S5P
Stage Micrometer
R1L3S1P
Stage Micrometer
R3L3S3P
Concentric Square Calibration Target

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General Specifications | |
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Chrome Thickness | 0.120 µm |
Chrome Optical Density | OD ≥3 at 430 nm |
Substrate Thickness | 0.06" (1.5 mm) |
Surface Flatness | ≤15 µm |
Line Spacing Tolerancea | ±1 µm |
Line Width Tolerancea | ±0.5 µm |
Substrate | Soda Lime Glass |
Features
- Horizontal Stage Micrometers with Divisions from 10 µm to 100 µm
- Concentric Squares with Fourteen Positive Pattern Sizes from 0.1 mm to 50 mm
Thorlabs offers stage micrometers and concentric square patterns for calibrating distances in an imaging system. These targets feature soda lime glass substrates with vacuum-sputtered, low-reflectivity chrome. Each pattern is manufactured using photolithography, allowing for edge features to be resolved down to approximately 1 µm.
Mounting
These test targets can be mounted in one of four of our microscopy slide holders. Our MAX3SLH fixed slide holder provides two spring clips to mount the optic and can be mounted to any of our 3-axis flexure stages. The MAX3SLH is only compatible with test targets greater than or equal to 2" wide and provides a clear aperture of 1", which may cover the chrome pattern on some of the test targets. Thorlabs also offers our XYF1(/M) test target positioning mount (see photo above) capable of translating a 1" (25.4 mm) to 3" (76.2 mm) wide rectangular target over a 50 mm (1.97") x 30 mm (1.18") area. The mount offers five 8-32 (M4) taps for six post-mountable orientations. The XYF1 uses nylon-tipped setscrews to secure the optic. Please note that the mount's support arms overlap the optic by 4.4 mm on each side. For users of the MLS203 microscopy stage, we offer the MLS203P2 slide holder for inverted microscopes, which can mount slides 25 mm to 26.5 mm wide and petri dishes 30 mm to 60 mm in diameter.
Targets Selection Guide | |||
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Resolution Test Targets | Distortion Test Targets | Slant Edge MTF Resolution Test Targets | Calibration Targets |
Mounting Options | |||||
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Mount Item # | MAX3SLH | XYF1 | MLS203P2 | FFM1 with B3C | SFH2 |
Image (Click to Enlarge) |
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Compatible Target Item #s |
R1L3S1P, R1L3S2P | R1L1S5Pa, R1L3S1P, R1L3S2P, R3L3S3P |
R1L1S5P | R1L1S5P,R1L3S1P, R1L3S2P,R3L3S3P |
R1L1S5P,R1L3S1P, R1L3S2P,R3L3S3P |
Features/Mounting | Mounts to 3-Axis Stages or Any with 1/4"-20 Taps |
XY Translation Ø1/2" Post Mountable |
Mounts to Our MLS203-1 and MLS203-2 Fast XY Scanning Stages |
Ø1/2" Post Mountable | Ø1/2" Post Mountable |
Customization Parameters | ||
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Substrate Sizea | Min | 8 mm x 8 mm (5/16" x 5/16") |
Max | 85 mm x 85 mm (3.35" x 3.35") | |
Substrate Materials | Soda Lime Glass UV Fused Silica Quartz |
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Coating Material | Reflective or Antireflective Chrome | |
Coating Optical Density | >3b or >6c @ 430 nm | |
Minimum Pinhole/Spot | Ø1 µm | |
Minimum Line Width | 1 µm | |
Line Width Tolerance | -0.25 / +0.50 µm | |
Maximum Line Density | 250 lines/mm |
Custom OEM Test Targets and Reticles
Our in-house photolithographic design and production capabilities enable us to create a range of patterned optics. We manufacture test targets, distortion grids, and reticles at our Thorlabs Spectral Works facility in Columbia, South Carolina. These components have served a wide variety of applications, being implemented in microscopes, imaging systems, and optical alignment setups.
In addition to our catalog test targets and reticles offered from stock, we can provide custom chrome patterns on soda lime, UV fused silica, or quartz substrates from 8 mm by 8 mm up to 85 mm by 85 mm. Substrates can be cut to shape for your application. Our photolithographic coating process allows us to create chrome features down to 1 µm. A few sample patterns are shown below, which can made positive or negative, as shown in the image directly below.
For a quote on custom test targets and reticles, please contact us at TSW@thorlabs.com.
Sample Patterns
Example Applications
- Etched Reticles
- Gray Scale Masks
- Resolution Reticles
- Diagnostic Reticles
- Recreational Scopes
- Notching Reticles
- Eyepiece Scales
- Illuminated Crosshairs
- Obstruction Targets
- Binocular Reticles

Click to Enlarge
Positive and Negative Crosshair Sample Pattern
This tab details an optimal cleaning technique developed by our engineers for cleaning reticles, test targets, distortion targets, and calibration targets.
Cleaning Procedure
- Use a clean wet sponge, preferably made of polyvinyl alcohol (PVA), and dish detergent to gently scrub the front and back surfaces of your reticle or target.
- Rinse with water.
- Blow dry with clean dry air, or allow the reticle or target to air dry on a clean surface.
We do not suggest using a towel, rag, or wipe to dry the surface. If contamination persists, soak the reticle or target in a detergent and water solution for 1 hour, repeating as necessary.
Posted Comments: | |
user
 (posted 2023-01-11 09:39:39.03) I'd like to know if the +/- 1 μm line spacing tolerance is valid for any pair of lines on the target. Or is the tolerance valid only for neighbouring lines, and the tolerance from the first to the last of for example a group of ten lines may be up to +/- 10 μm?
I suspect it is the former, but can you please confirm? Bill Albert
 (posted 2021-12-01 10:40:26.26) Can ThorLabs supply calibration certificates with the Stage Micrometer Calibration Targets? cdolbashian
 (posted 2021-12-23 01:59:08.0) Thank you for reaching out to us Bill. Right now, all we can provide is a self certification and/or a certificate of conformance provided you share your product's "TP number", which would be listed on the packaging of your product. We are aiming to provide NIST traceability in the future for our test and resolution targets. Stephanie G
 (posted 2021-07-09 06:58:17.04) Are these compatible with transmission illumination? YLohia
 (posted 2021-07-12 08:05:30.0) Hello, the positive targets consist of a chrome pattern plated on to a clear substrate and are useful for front-lit and general applications. Alternatively, the negative targets (can be custom ordered by emailing your local Thorlabs Tech Support team or techsales@thorlabs.com if you are in the US) use the same chrome coating to cover the substrate, leaving the pattern itself clear, and work well in back-lit and highly illuminated applications. Richard Krusemark
 (posted 2021-06-18 11:35:59.29) You sell this with a specific statement that the unit is "useful for the calibration of distances within imaging systems". Yet this item does not come with any sort of certificate of conformance. Are you kidding me? You can't calibrate something with a complete unknown. Now I have to find a reputable company to calibrate my standards that I just bought that have no standard. I am so glad I waisted my companies money on these. I will be sure not to return to this site for more standards. cdolbashian
 (posted 2021-06-25 09:20:35.0) Thank you for reaching out to us at Thorlabs! Following your feedback, we are working on a version of this product which has a calibration/conformance document included. I have reached out to you directly with some more information. |


Click to Enlarge
Close Up of the R1L1S5P Horizontal Scale with Crosshair
- 1" x 1" (25.4 mm x 25.4 mm) Stage Micrometer
- For Calibrating Eyepiece Reticles or Objective Magnification
- 20 mm Horizontal Scale with 100 µm Divisions and Crosshair
This target features a stage micrometer pattern with 100 µm divisions and numerical labeling every 1 mm. The pattern is oriented horizontally with a 20 mm long scale and a perpendicular crosshair. The target consists of a 1" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. This positive target is useful for the calibration of distances within imaging systems.

- For Calibrating Eyepiece Reticles or Objective Magnification
- R1L3S1P: 10 mm Scale with 50 µm Divisions
- R1L3S2P: 1 mm Scale with 10 µm Divisions
- Scales Centered on a 3" x 1" (76.2 mm x 25.4 mm) Microscope Slide
These targets each feature a horizontal stage micrometer pattern. The R1L3S1P micrometer has a 10 mm long scale with 50 µm divisions and numerical labeling every millimeter, while the R1L3S2P has a 1 mm long scale with 10 µm divisions and numerical labeling every 0.1 mm. Both targets consist of a 3" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

- 3" x 3" (76.2 mm x 76.2 mm) Concentric Square Target
- Calibrate a Measurement for Imaging Software
- Low-Reflectivity, Vacuum-Sputtered Chrome
The R3L3S3P Concentric Square Target features fourteen concentric squares with lengths and widths ranging from 0.1 mm to 50 mm (see table below). Each square is labeled with its width on the target. This target is made from a soda lime glass substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.
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