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3-Axis NanoMax with Differential Adjusters 


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3-Axis NanoMax with Differential Adjusters 

Common Specifications
Travel4.0 mm
Load Capacity (Max)2.2 lbs (1 kg)
Coarse Adjustment Range0.5 mm/rev
Fine Adjustment50 µm/rev (300 µm Range)
Piezo Specifications (MAX311D and MAX312D Only)
Piezo Voltage Range0 - 75 V
Piezo Range20 µm
Piezo Resolution (Theoretical)20 nm (5 nm for Closed Loop)
Piezo Bidirectional Repeatability200 nm Open Loop,
5 nm Closed Loop
Piezo Absolute On-Axis Accuracy1.0 µm

Features

  • 4 mm Travel Per Axis
  • Flexure Design Ensures Smooth Continuous Motion with No Friction
  • Compact Design: 157.4 mm x 160.4 mm x 62.5 mm
    (6.2" x 6.31" x 2.46") Including Actuators
  • Enhanced Long-Term Stability
  • All Adjusters Tied to the Base, Minimizing Crosstalk
  • Piezo and Feedback Cables Included

NanoMax Parallel Flexure Stages
Traditional multi-axis stacked stage, touching one of the three drives will result in unwanted motion within the assembly. Our NanoMax Flexure stages feature drives which are coupled directly to the base, minimizing this unwanted motion. The result is a design ideal for applications requiring sub-micron resolution.

Precision Differential Drives
The differential drives offer 4 mm of coarse travel and 300 µm of fine travel with a resolution of 50 µm per revolution. The graduations engraved on the fine travel adjusters provide a clear reference point for applications that require absolute positioning.

Easy Alignment of Accessories
A central keyway in the top platform allows rapid system reconfiguration while maintaining accessory alignment. A wide range of accessories is available to mount items such as microscope objectives, collimation packages, wave guides, fiber and much more. If options are required for off-center mounting ofcomponents, the grooved top plate can be replaced with the RB13P1 adapter plate, which has an array of 1/4"-20 (M6) and 8-32 (M4) mounting holes (see image at top of page).

In addition, several adapter plates are available to mount the NanoMax series stages to a wide range of other Thorlabs rotation and long travel linear stages.

Combined, these features make the MAX300D series flexure stage a solid platform for alignment applications that require high stability and repeatability.

Common Specifications

Item #MAX311D, MAX312D, and MAX313D
Travel4 mm
Load Capacity (Max)2.2 lbs (1 kg)
Recommended Load Capacity<1.54 lb (<0.7 kg)
Thermal Stability1 µm/°C
Weight1.65 lbs (0.75 kg)
Deck Height2.46" (62.5 mm)
Optical Axis Height2.95" (75 mm)
Differential Adjuster Specifications
Coarse Adjustment0.5 mm/rev
Fine Adjustment (with Vernier)50 µm/rev (300 µm Range)

Arcuate Cross Talk Specifications

The measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The table below shows the theoretical amount of cross talk to the Z axis, for movement at various X positions (Y axis at zero).
Cross talk at Y axis positions (with X at zero) would be the same.

X axis position (mm)0.00.51.01.52.02.53.03.54.0
Arcuate Motion in Z axis (µm)80.045.020.05.00.05.020.045.080.0

The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
The table below shows the typical amount of cross talk to the X axis, for movement at various Z axis positions (Y axis at zero).
Cross talk to Y axis positions (with X axis at zero) would be the same.

Z axis position (mm)0.00.51.01.52.02.53.03.54.0
Arcuate Motion in X axis (µm)57.132.114.33.60.03.614.332.157.1

 

Piezo Stage Specifications

Item #MAX311DMAX312D
Piezo Specifications
Piezo ControlClosed LoopOpen Loop
Piezo Voltage Range0 - 75 V
Piezo Range20 µm
Piezo Resolution (Theoretical)5 nm20 nm
Piezo Bidirectional Repeatability0.05 µm0.2 µm
Absolute On-Axis Accuracy1.0 µm
Resonant Frequency
No Load375 Hz
with 9.7oz (275 g) Load200 Hz
with 20.3oz (575 g) Load150 Hz
Compatible Piezo ControllersBPC303
MDT693B (For Use with MAX312D)
MPZ601
TPZ001 (For use with MAX311D (with TSG001) and MAX312D
TSG001 (For use with MAX311D with the TPZ001)
MNA601/IR (For Use with MAX311D)
BNT001/IR (For Use with MAX311D)
TNA001 (For Use with MAX311D)

Displacement Sensor

7 Pin LEMO Male

MAX311D Only

LEMO Male

Piezo Drive Input

SMC Male

MAX311D & MAX12D

SMA Male

Nominal maximum input voltage: 75 V
Absolute maximum input voltage: 100 V

PinDesignation
1+15 V
2Oscillator +
30 V
4Signal Out -
5Signal Out +
6-15 V
7Travel
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Posted Comments:
Poster: wjwjfwjf
Posted Date: 2009-09-27 07:45:32.0
The service is a little slow.
Poster: jens
Posted Date: 2009-05-25 09:50:16.0
A response from Jens at Thorlabs: Dear Hamit, I am sorry that you are encountering difficulties with the product. We will need additional information regarding driver electronics and load so that we can resolve this as soon as possible. I will contact you via your email directly.
Poster: hamitkal
Posted Date: 2009-05-25 07:58:21.0
Dear Sir, We are using Nanomax-TS Max 342 translation stage in our lab and the scanning motor heats up and it stops after a while and this undermines our experiment and is very annoying. We need your attention to this matter immediately. Regards, Hamit Kalaycioglu Bilkent University, Turkey
Poster: Laurie
Posted Date: 2009-02-05 15:27:44.0
Response from Laurie at Thorlabs to melsscal: our MAX313/M can only obtain 20 nm piezo resolution when using piezo controllers. To control the piezos, we commonly recommend the BPC203 controller, although there are other options available too (BNT001, TPZ001 etc). Please let us know if you have additional questions.
Poster: melsscal
Posted Date: 2009-02-05 03:37:28.0
1. Can you please confirm whether MAX313/M be operated manually within 20nm Piezo resolution (i.e. w/o using any Piezo controllers) ? 2.Can you please suggest a suitable controller for MAX313/M to acieve 5nm piezo resolution ? Regards A.K.Bose
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3-Axis NanoMax Stage, Differential Drives, Closed-Loop Piezos
  Closed-Loop Piezoelectric Actuators
  20 µm Piezo Travel Range
  Positional Resolution of 5 nm

The MAX311D is our highest-prescision three-axis NanoMax system. Three strain gauge displacement sensors provide a feedback voltage signal that is linearly proportional to the displacement of the piezoelectric element. This signal is used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements. If driven by a closed-loop controller (such as the BPC303, MPZ601, or TPZ001 and TSG001 combination), the piezoelectric actuator can be controlled in a feedback mode that improves the positional resolution from 20 nm to 5 nm. Also, the hysteresis, creep, and drift associated with piezos can be monitored and compensated via this closed-loop control.

Furthermore, when the stage is coupled with a NanoTrak controller (BNT001/IR , MNA601/IR, or TNA001/IR), the system becomes a powerful auto-alignment solution that maintains optical throughput and eliminates coupling efficiency loss due to thermal drift or other external forces. PAA622 piezo feedback cables are included with all closed-loop piezoelectric Nanomax stages.

Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX311D Support Documentation
MAX311D Closed-Loop 3-Axis NanoMax Stage w/ Differential Drives and Piezos
$2,807.84
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX311D/M Support Documentation
MAX311D/M Closed-Loop 3-Axis NanoMax Stage w/ Differential Drives and Piezos, Metric
$2,807.84
Today
3-Axis NanoMax Stage, Differential Drives, Open-Loop Piezos
  Open-Loop Piezoelectric Actuators
  20 µm Piezo Travel Range
  20 nm Positional Resolution

The MAX312D offers open-loop piezoelectric actuators for applications requiring sub-micron positioning resolution. Compatible controllers are the MDT693B, BPC303, MPZ601, or TPZ001.

Furthermore, when the stage is coupled with a NanoTrak controller (BNT001/IR , MNA601/IR, or TNA001/IR), the system becomes a powerful auto-alignment solution that maintains optical throughput and eliminates coupling efficiency loss due to thermal drift or other external forces.

Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX312D Support Documentation
MAX312D NanoMax300 with Differential Drives and Piezos
$2,039.72
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX312D/M Support Documentation
MAX312D/M NanoMax300 with Differential Drives and Piezos, Metric
$2,039.72
Lead Time
3-Axis NanoMax Stage, Differential Drives, No Piezos
  Differential Drives
  0.5 mm/rev Coarse Adjustment Over 4mm Travel Range
  50 µm/rev Fine Adjustment Over 300 µm Travel Range

The MAX313D is our base MAX300D stage with differential drives. The stage does not include piezos or strain gauges. However, we offer a line of external piezoelectric actuators that can be used inline with the differential drives to add greater precision if application requirements change.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX313D Support Documentation
MAX313D NanoMax300 with Differential Drives, No Piezos
$1,552.03
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX313D/M Support Documentation
MAX313D/M NanoMax300 with Differential Drives, No Piezos, Metric
$1,552.03
Today
Tapped Top Plates
MMP1
Click to Enlarge
MMP1 Top Plate (Included with Stages)

The RB13P1(/M) optional top plate replaces the standard grooved top plate of the stages sold above. It has a generous array of thirteen 1/4"-20 (M6) and twelve 8-32 (M4) mounting holes to adapt the stage for use with general purpose accessories and components. 

The MMP1(/M) top plate is included with the stages sold above but can be purchased separately below. This plate features a 3 mm wide central keyway to allow rapid configuration while maintaining accessory alignment, as well as four 4-40 (M2), sixteen 6-32 (M3), and nine 8-32 (M4) mounting holes. 

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
RB13P1 Support Documentation
RB13P1 Adapter Plate with 1/4"-20 and 8-32 Taps
$48.40
Today
MMP1 Support Documentation
MMP1 Replacement Mounting Plate for Flexure Stages
$69.36
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
RB13P1/M Support Documentation
RB13P1/M Adapter Plate with M6 and M4 Taps
$48.40
Today
MMP1/M Support Documentation
MMP1/M Replacement Mounting Plate for Flexure Stages, Metric
$69.36
Today
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