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3-Axis NanoMax Flexure Stages


  • 4 mm of Travel Per Axis
  • Modular High-Resolution Drive Options
  • Open- and Closed-Loop Piezo Versions
  • Thermally Stable Design Minimizes Drift

MAX313D

Differential Micrometers
No Built-In Piezos

MAX341

Stepper Motor Actuators
Closed-Loop Piezos

MAX302

No Actuators
Open-Loop Piezos

RB13P1

Additional Top Plate for
Off-Center and General
Optics Mounting

Patents 6,186,016 and 6,467,762

Related Items

Flexure StageClick to Enlarge
3-Axis Flexure Stage Mounted Directly to a PY004 High-Load Pitch and Yaw Stage for 5-Axis Control
Flexure StageClick to Enlarge
APY002 Pitch & Yaw Stage Shown Mounted on a 3-Axis Flexure Stage, Thereby Enabling 5-Axis Control
Common Specificationsa
Travel 4 mm
Travel Mechanism Parallel Flexure
Deck Height (Nominal) 62.5 mm (2.46")
Optical Axis Height (Nominal) 75 mm (2.95")
Load Capacity (Max) 1 kg (2.2 lbs)
Load Capacity (Recommended) <0.7 kg (<1.54 lbs)
Thermal Stability 1 µm/°C
Parallelism of Top Plate <100 µm
Top Plate
Mounting

Holes
Imperial Plate
(Item # MMP1)
Metric Plate
(Item # MMP1/M)
  • Please see the Specs Tab for Complete Specifications

Features

  • 4 mm of X, Y, and Z Travel
  • Flexure Design Ensures Smooth Continuous Motion and Long-Term Stability
  • Grooved Top Plate Ensures Alignment of Multi-Axis Stage Accessories
  • Compact Size Measuring 112.0 mm x 112.0 mm (4.41" x 4.41") Without Drives
  • All Adjusters Coupled to the Base to Minimize Crosstalk
  • Piezo Options Provide up to 5 nm Resolution in Closed Loop
  • Modular Design for Interchanging Actuators

Thorlabs' 3-axis NanoMax Flexure Stages are ideal for use in fiber launch systems or applications that require sub-micron resolution. The parallel flexure design ensures precise, smooth, continuous motions with negligible friction. Each unit provides 4 mm (0.16") of X, Y , and Z travel with a maximum load capacity of 1 kg (2.2 lbs). The nominal deck height of the stage is 62.5 mm (2.46"), which matches that of our 3-Axis MicroBlock compact flexure stages and RollerBlock long travel stages. Adapter plates are available for mounting our NanoMax stages to a wide range of other Thorlabs rotation and long travel linear stages.

Precision Drives
The modular design of our 3-axis NanoMax stages allows the drives to be removed and replaced at any time. For all of our compatible drive options, please see the Drives tab. Pre-configured stages are also offered that have differential micrometers or stepper motor actuators for out-of-the-box manual or motorized operation, respectively. All drives are coupled directly to the base to minimize any unwanted motion in the system. This feature is ideal for any application requiring sub-micron resolution. For nanopositioning applications we have versions with internal piezoelectric actuators.

Flexure StageClick to Enlarge
HCS013 Objective Mount and HFF001 Quick-Release Fiber Clamp Accessories Attached to the Top Plate Using AM010 Cleats for Fiber Launch Applications

Piezo Options
The option for open- or closed-loop piezos allows these stages to achieve nanometer resolution. The piezoelectric actuators are built into the stage, have 20 µm of travel, and can be controlled using many of our open- or closed-loop piezo controllers (see the Specs tab for all compatible controllers). When these stages are coupled with a NanoTrak controller (BNT001/IR, MNA601/IR, or TNA001/IR), the system becomes a powerful auto-alignment solution that maintains optical throughput and eliminates coupling efficiency loss due to thermal drift or other external forces.

Flexure Stage
Click to Enlarge

Piezo and Feedback Connections

Stages with open-loop piezo actuators do not have a strain gauge displacement sensor and are ideal for applications requiring positioning resolution down to 20 nm. Versions with closed-loop piezo actuators have internal strain gauge displacement sensors that provide a feedback voltage signal that is linearly proportional to the displacement of the piezoelectric element. This feedback signal increases the resolution to 5 nm and can be used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements, making these stages an excellent choice for applications requiring nanometer resolution.

Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support.

Easy Alignment of Accessories
Two central keyways in the top platform allow for rapid system reconfiguration while maintaining accessory alignment (see the image above and to the left). The crossed pattern allows for changing the orientation of the stage for right- and left-handed use. A wide range of accessories is available to mount items such as microscope objectives, collimation packages, wave guides, fiber, and much more. If options are required for off-center mounting of components, the grooved top plate can be replaced with the RB13P1 adapter plate (sold at the bottom of this page), which has an array of 1/4"-20 (M6) and 8-32 (M4) mounting holes.

Stage Specifications

Item #MAX313D(/M)MAX312D(/M)MAX311D(/M)MAX343(/M)MAX341(/M)MAX303(/M)MAX302(/M)MAX301(/M)
Included Drives DRV3 Differential Micrometer Drives DRV001 Stepper Motor Actuators N/A
Travel 4 mm
Deck Height (Nominal) 62.5 mm (2.46")
Optical Axis Height (Nominal) 75 mm (2.95")
Load Capacity (Max) 1 kg (2.2 lbs)
Recommended Load Capacity <0.7 kg (<1.54 lbs)
Thermal Stability 1 µm/°C
Parallelism of Top Plate <100 µm
Piezo Specifications
Control N/A Open Loop Closed Loop N/A Closed Loop N/A Open Loop Closed Loop
Drive Voltage Range 0 - 75 V 0 - 75 V 0 - 75 V
Range 20 µm 20 µm 20 µm
Capacitance 3.6 µF 3.6 µF 3.6 µF
Theoretical Resolution 20 nm 5 nm 5 nm 20 nm 5 nm
Bidirectional Repeatability 0.2 µm 0.05 µm 0.05 µm 0.2 µm 0.05 µm
Absolute On-Axis Accuracy 1.0 µm 1.0 µm 1.0 µm
Resonant Frequency
(No Load)
375 Hz 375 Hz 375 Hz
Resonant Frequency
with 275 g (9.7oz) Load
200 Hz 200 Hz 200 Hz
Resonant Frequency
with 575 g (20.3oz) Load
150 Hz 150 Hz 150 Hz
Compatible Piezo Controllers BPC303
MDT693B
MPZ601
TPZ001
MNA601/IR
BNT001/IR
BPC303
MPZ601
TPZ001 with TSG001
MNA601/IR
BNT001/IR
BPC303
MPZ601
TPZ001with TSG001
MNA601/IR
BNT001/IR
BPC303
MDT693B
MPZ601
TPZ001
MNA601/IR
BNT001/IR
BPC303
MPZ601
TPZ001with TSG001
MNA601/IR
BNT001/IR

Stepper Motor Specifications

Item #DRV001
Backlash <7 µm
Max Acceleration 4 mm/s2
Velocity Range 40 µm/sec - 4 mm/s
Min Achievable Incremental Movement 60 nm
Bidirectional Repeatability 500 nm
Home Location Accuracy ± 1.5 µm
Pitch X-Axis: 0.015°
Y-Axis: 0.015°
Z-Axis: 0.0047°
Yaw X-Axis: 0.0034°
Y-Axis: 0.0034°
Z-Axis: 0.0032°
Limit Switches Ceramic Tip Mechanical
Manual Over Ride Yes
Compatible Stepper Motor Controllers BSC203
MST602

Differential Micrometer Specifications

Item #DRV3
Travel Range 8 mm (0.31") Coarse, 300 µm Fine
Coarse Adjustment (with Vernier Scale) 500 µm/rev
Fine Adjustment (with Vernier Scale) 50 µm/rev

Arcuate Cross Talk Specifications

The measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The table below shows the theoretical amount of cross talk to the Z axis, for movement at various X positions (Y axis at zero). Cross talk at Y axis positions (with X at zero) would be the same.

X Axis Position (mm) 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in Z Axis (µm) 80.0 45.0 20.0 5.0 0.0 5.0 20.0 45.0 80.0

The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
The table below shows the typical amount of cross talk to the X axis, for movement at various Z axis positions (Y axis at zero). Cross talk to Y axis positions (with X axis at zero) would be the same.

Z Axis Position (mm) 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in X Axis (µm) 57.1 32.1 14.3 3.6 0.0 3.6 14.3 32.1 57.1
Removing the Actuators
Installing a DRV003 Micrometer
Click to Enlarge

Step 2
Unscrew the Knurled Knob and Remove the Actuator
Installing a DRV003 Micrometer
Click to Enlarge

Step 1
Rotate the Actuator Counterclockwise to Disengage the Actuator from the Platform

Modular Drive Options

All 3-Axis NanoMax system have a modular design that allows the drives to be removed and replaced at any time. This allows for mix-and-match customization of actuators depending on the amount of automation or resolution needed on each axis.

Replacing a drive is simple and can be done in three steps. First, retract the leadscrew of the actuator until it is no longer engaging the moving body of the stage. Then unscrew the knurled knob attaching the existing drive to the stage. Finally, attach the new drive to the stage using the same knurled knob.

The drives compatible with our 3-axis NanoMax stages are summarized below. Some drives have limited travel range when used with the NanoMax 3-axis flexure stages; see the table for more details. For more detailed information on each drive, please see the full presentation for our Stepper Motor Drive, Differential Micrometers and Thumbscrew Drives, or In-line Piezo Actuators.

Item #DRV004DRV3DRV001DRV120
Click Image
to Enlarge
DRV004 DRV3 DRV001 DRV120
Actuator Type Thumbscrew Differential Micrometera Stepper Motorb Piezoelectric with Feedback
Travel Range 8 mm (0.31")c Coarse: 8 mm (0.31")c
Fine: 300 µm
8 mm (0.31")c 20 µm
Adjustment 500 µm/revolution Coarse: 500 µm/revolution
Fine: 50 µm/revolution
-
Resolution - - 60 nm/step
200 steps/rev of Leadscrew
5 nmd
Compatible Controllers - Benchtop: BSC200 Series
Rack Module: MST602
Benchtop: BPC300 Series
Rack Mount: MPZ601
T-Cubes: TPZ001 with TSG001
  • Included with MAX311D(/M), MAX312D(/M), and MAX313D(/M) Stages
  • Included with the MAX341(/M) and MAX343D(/M) Stepper-Motor-Actuated Stages
  • Range Limited to 4 mm (0.16") by the NanoMax Stage
  • Closed Loop

Displacement Sensor

7-Pin LEMO Male

MAX311D, MAX341, MAX301

LEMO Male

Piezo Drive Input

SMC Male

MAX311D, MAX312D, MAX341, MAX301, MAX302

SMA Male

Nominal Maximum Input Voltage: 75 V
Absolute Maximum Input Voltage: 100 V

PinDesignation
1 +15 V
2 Oscillator +
3 0 V
4 Signal Out -
5 Signal Out +
6 -15 V
7 Travel

DRV001 Stepper Motor Connector Pins

D-Type Male

MAX341, MAX343

DB15 Male

PinDescriptionPinDescription
1 Limit Switch Ground 6 Motor Phase A-
2 Not Connected 7 Motor Phase A+
3 CW Limit Switch 8 to 14 Reserved for Future Use
4 Motor Phase B-
5 Motor Phase B+ 15 Earth GND

Multi-Axis Stage Selection Guide


Click to Enlarge

In the Above Application, a 3-Axis NanoMax Flexure Stage is Aligned in Front of a 6-Axis Stage at the Proper 112.5 mm Deck Height Using an AMA554 Height Adapter

3-Axis Stages
Thorlabs offers three different 3-Axis stage variations: NanoMax flexure stages, MicroBlock compact flexure stages, and RollerBlock long-travel stages. Each stage features a 62.5 mm nominal deck height. Our NanoMax line of 3-axis stages offers built-in closed- and open-loop piezos as well as modular drive options that include stepper motors, differential drives, or additional piezos. The MicroBlock stages are available with differential micrometer drives or fine thread thumbscrews; these drives are not removable. Finally, our RollerBlock stage drivers can be switched out for any actuator that has a Ø3/8" (9.5 mm) mounting barrel.

4- and 5-Axis Stages
Our 4- and 5-axis platforms are ideal for the static positioning of waveguides or complex optical elements with respect to our 3- or 6-axis high-performance alignment stages. Thorlabs' 4- and 5-axis platforms have nominal heights of 62.5 mm and 112.5 mm, depending on the platform chosen, for compatibility with our 3- and 6-axis stages, respectively. To increase the stage height of the 3-axis stages to 112.5 mm, we recommend our AMA554 Height Adapter, shown in the image to the right.

6-Axis Stages
Thorlabs' 6-Axis NanoMax Nanopositioners are ideal for complex, multi-axis positioning and have a nominal deck height of 112.5 mm. These stages offer a common point of rotation and a patented parallel flexure design that allows all actuators to be coupled directly to the base to minimize any unwanted motion in the system. Built-in closed- and open-loop piezo options are available. A selection of modular drive options allows any axis to be manual or motorized with the option for external piezos. Our units without included actuators are also available in right- or left-handed configurations. To increase the stage height of the 3-axis stages to 112.5 mm, we recommend our AMA554 Height Adapter, shown in the image to the right.

A complete selection and comparison of our multi-axis stages is available below.

 

3-Axis Stages

Item #MAX313DMAX312DMAX311DMAX343MAX341MAX303MAX302MAX301MBT602MBT616DRB13MRBL13D
Stage Type NanoMax Flexure Stages MicroBlock Compact
Flexure Stages
RollerBlock Long Travel Stages
Included Drives DRV3 Differential Micrometers DRV001 Stepper Motor Actuators N/A Fine Thread Thumbscrews Differential Micrometers 148-801ST
Micrometer Drives
DRV304
Differential Micrometers
Built-in Piezos N/A Open
Loop
Closed Loop N/A Closed Loop N/A Open Loop Closed Loop N/A N/A
Travel (X, Y, Z) 4 mm (0.16") 13 mm (0.51")
Deck Height (Nominal) 62.5 mm (2.46")
Optical Axis Height (Nominal) 75 mm (2.95")
Load Capacity (Max) 1 kg (2.2 lbs) 4.4 kg (9.7 lbs)
Thermal Stability 1 µm/°C -
Weight 1.00 kg (2.20 lbs) 0.64 kg (1.40 lbs) 0.59 kg (1.30 lbs)

4-Axis Stages

Item #MBT401D
MBT401D/M
MBT402D
MBT402D/M
NBM413
Stage Type 4-Axis Thin-Profile MicroBlock Device Platform 4-Axis Low-Profile MicroBlock Device Platform 4-Axis NanoBlock Device Platform
Included Drives Differential Micrometers Differential Micrometers
Built-in Piezos N/A
Travel Horizontal Axis (Y)a 13 mm (0.51")
Vertical Axis (Z) 6 mm (0.24")
Pitch (θy) ±5° ±4°
Yaw (θz) ±5° ±4°
Deck Height (Nominal) 62.5 mm (2.46") 112.5 mm (4.43")
Optical Axis Height (Nominal) 75 mm (2.95") 125 mm (4.92")
Load Capacity (Max) 0.5 kg (1.1 lbs)
  • Perpendicular to the Optical Axis (X)

5-Axis Stages

Item #MBT401D (MBT401D/M) or
MBT402D (MBT402D/M) with
MBT501
NBM513PY005
Stage Type 5-Axis MicroBlock Device Platform System 5-Axis NanoBlock Device Platform Compact 5-Axis Platform
Included Drives Differential Micrometers Differential Micrometers 100 TPI Actuators
Built-in Piezos N/A
Travel Optical Axis (X) 13 mm (0.51") 13 mm (0.51") 3 mm (0.12")
Horizontal Axis (Y) 13 mm (0.51") 13 mm (0.51") 3 mm (0.12")
Vertical Axis (Z) 6 mm (0.24") 6 mm (0.24") 3 mm (0.12")
Pitch (θy) ±5° ±4° ±3.5°
Yaw (θz) ±5° ±4° ±5°
Deck Height (Nominal) 112.5 mm (4.43") 112.5 mm (4.43") 62.5 mm (2.46")a
Optical Axis Height (Nominal) 125 mm (4.92") 125 mm (4.92") 75 mm (2.95")a
Load Capacity (Max) 0.5 kg (1.1 lbs) 0.5 kg (1.1 lbs) 0.23 kg (0.5 lbs)
  • Nominal deck height of 62.5 mm and optical axis height of 75 mm can only be achieved using the PY005A2 Height Adapter and MMP1 Mounting Plate.

6-Axis Stages

Item #MAX601D
MAX601D/M
MAX602D
MAX602D/M
MAX603D
MAX603D/M
MAX604
MAX604/M
MAX605
MAX605/M
MAX606
MAX606/M
MAX607
MAX607/M
MAX607La
MAX607L/Ma
MAX608
MAX608/M
MAX608La
MAX608L/Ma
MAX609
MAX609/M
MAX609La
MAX609L/Ma
Stage Type 6-Axis NanoMax Flexure Stage
Included Drives DRV3 Differential Micrometers DRV001 Stepper Motor Actuators N/A
Built-in Piezos N/A Open Loop Closed Loop N/A Open Loop Closed Loop N/A Open Loop Closed Loop
Travel X, Y, Z 4 mm (0.16")
θxθyθz
Deck Height (Nominal) 112.5 mm (4.43")
Optical Axis Height (Nominal) 125 mm (4.92")
Load Capacity (Max) 1.0 kg (2.2 lbs)
  • Left-Handed Version
Documents Tab to be Discontinued...
Please note that this tab will be removed at the end of 2015. The same information displayed here can be found by clicking on the red Docs Icon (Support Documentation icon) next to the item of interest in the pricing area below.
Click the Support Documentation icon document icon or Part Number below to view the available support documentation
Part NumberProduct Description
MAX301 Support Documentation MAX301:3-Axis NanoMax Stage, Actuators Not Included, Closed-Loop Piezos
MAX301/M Support Documentation MAX301/M:3-Axis NanoMax Stage, Actuators Not Included, Closed-Loop Piezos, Metric
MAX302 Support Documentation MAX302:3-Axis NanoMax Stage, Actuators Not Included, Open-Loop Piezos
MAX302/M Support Documentation MAX302/M:3-Axis NanoMax Stage, Actuators Not Included, Open-Loop Piezos, Metric
MAX303 Support Documentation MAX303:3-Axis NanoMax Stage, Actuators Not Included
MAX303/M Support Documentation MAX303/M:3-Axis NanoMax Stage, Actuators Not Included, Metric
MAX311D Support Documentation MAX311D:3-Axis NanoMax Stage, Differential Drives, Closed-Loop Piezos
MAX311D/M Support Documentation MAX311D/M:3-Axis NanoMax Stage, Differential Drives, Closed-Loop Piezos, Metric
MAX312D Support Documentation MAX312D:3-Axis NanoMax Stage, Differential Drives, Open-Loop Piezos
MAX312D/M Support Documentation MAX312D/M:3-Axis NanoMax Stage, Differential Drives, Open-Loop Piezos, Metric
MAX313D Support Documentation MAX313D:3-Axis NanoMax Stage, Differential Drives, No Piezos
Part NumberProduct Description
MAX313D/M Support Documentation MAX313D/M:3-Axis NanoMax Stage, Differential Drives, No Piezos, Metric
MAX341 Support Documentation MAX341:3-Axis NanoMax Stage, Stepper Motors, Closed-Loop Piezos
MAX341/M Support Documentation MAX341/M:3-Axis NanoMax Stage, Stepper Motors, Closed-Loop Piezos, Metric
MAX343 Support Documentation MAX343:3-Axis NanoMax Stage, Stepper Motors
MAX343/M Support Documentation MAX343/M:3-Axis NanoMax Stage, Stepper Motors, Metric
MMP1 Support Documentation MMP1:Replacement Mounting Plate for Flexure Stages
MMP1/M Support Documentation MMP1/M:Replacement Mounting Plate for Flexure Stages, Metric
RB13P1 Support Documentation RB13P1:Adapter Plate with 1/4"-20 and 8-32 Taps
RB13P1 Support Documentation RB13P1:Adapter Plate with 1/4"-20 and 8-32 Taps
RB13P1/M Support Documentation RB13P1/M:Adapter Plate with M6 and M4 Taps
RB13P1/M Support Documentation RB13P1/M:Adapter Plate with M6 and M4 Taps

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Posted Comments:
Poster:wjwjfwjf
Posted Date:2009-09-27 07:45:32.0
The service is a little slow.
Poster:jens
Posted Date:2009-05-25 09:50:16.0
A response from Jens at Thorlabs: Dear Hamit, I am sorry that you are encountering difficulties with the product. We will need additional information regarding driver electronics and load so that we can resolve this as soon as possible. I will contact you via your email directly.
Poster:hamitkal
Posted Date:2009-05-25 07:58:21.0
Dear Sir, We are using Nanomax-TS Max 342 translation stage in our lab and the scanning motor heats up and it stops after a while and this undermines our experiment and is very annoying. We need your attention to this matter immediately. Regards, Hamit Kalaycioglu Bilkent University, Turkey
Poster:Laurie
Posted Date:2009-02-05 15:27:44.0
Response from Laurie at Thorlabs to melsscal: our MAX313/M can only obtain 20 nm piezo resolution when using piezo controllers. To control the piezos, we commonly recommend the BPC203 controller, although there are other options available too (BNT001, TPZ001 etc). Please let us know if you have additional questions.
Poster:melsscal
Posted Date:2009-02-05 03:37:28.0
1. Can you please confirm whether MAX313/M be operated manually within 20nm Piezo resolution (i.e. w/o using any Piezo controllers) ? 2.Can you please suggest a suitable controller for MAX313/M to acieve 5nm piezo resolution ? Regards A.K.Bose

3-Axis NanoMax Stage with Differential Adjusters

Item #MAX313D(/M)MAX312D(/M)MAX311D(/M)
Manual Drive Specifications
Item # DRV3
Travel Range Coarsea 4 mm (0.16")
Fine 300 µm Fine
Coarse Adjustment
(with Vernier Scale)
500 µm/rev
Fine Adjustment
(with Vernier Scale)
50 µm/rev
Piezo Specificationsb
Control N/A Open Loop Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 20 nm 5 nm
Bidirectional Repeatability 200 nm 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Full coarse travel range of the DRV3 Differential Actuator is 8 mm (0.31"). This range is limited to 4 mm by the Stage.
  • Please see the Specs Tab for Complete Piezo Specifications
  • Preconfigured with DRV3 Differential Micrometers for Manual Adjustments
  • Available With or Without Internal Closed- or Open-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows Drives to be Removed and Replaced
  • All Adjusters Tied to a Common Ground and Side Mounted
  • Ideal for Use in Professional Fiber Launch Systems
  • PAA622 Piezo Feedback Cables are Included with the MAX311D(/M) Stage

Thorlabs' NanoMax Stages with Differential Adjusters provide 4 mm (0.16") of coarse travel and 300 µm of fine travel. The coarse adjuster has a Vernier scale with 10 µm graduations while the fine adjuster has a Vernier scale with 1 µm graduations. This resolution and travel range make these stages ideal for optimizing the coupling efficiency in a fiber alignment or waveguide positioning system. The graduations also allow for a clear reference point for absolute positioning within a system. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators.

5 Axis Mount with Flexure Stage
Click to Enlarge

MAX313D 3-Axis Stage with a PY005 5-Axis StagePY005A2 Base, and MMP1 Top Plate for Fiber Coupling

In addition to the features above, the MAX312D and MAX311D NanoMax Stages incorporate open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX311D Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available / Ships
MAX313D Support Documentation
MAX313D3-Axis NanoMax Stage, Differential Drives, No Piezos
$1,600.00
Today
MAX312D Support Documentation
MAX312D3-Axis NanoMax Stage, Differential Drives, Open-Loop Piezos
$2,100.00
Today
MAX311D Support Documentation
MAX311D3-Axis NanoMax Stage, Differential Drives, Closed-Loop Piezos
$2,900.00
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX313D/M Support Documentation
MAX313D/M3-Axis NanoMax Stage, Differential Drives, No Piezos, Metric
$1,600.00
Today
MAX312D/M Support Documentation
MAX312D/M3-Axis NanoMax Stage, Differential Drives, Open-Loop Piezos, Metric
$2,100.00
Today
MAX311D/M Support Documentation
MAX311D/M3-Axis NanoMax Stage, Differential Drives, Closed-Loop Piezos, Metric
$2,900.00
Today

3-Axis NanoMax Stage with Stepper Motor Actuators

Item #MAX343(/M)MAX341(/M)
Stepper Motor Drive Specificationsa
Item # DRV001
Travel Rangeb 4 mm (0.16")
Min Incremental Movement 60 nm
Velocity Range 40.0 µm/s to 4 mm/s
Max Acceleration 4 mm/s2
Compatible Drivers BSC203 and MST602
Piezo Specificationsa
Control N/A Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 5 nm
Bidirectional Repeatability 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Please see the Specs Tab for Complete Stepper Motor and Piezo Specifications
  • Full travel range of the DRV001 Stepper Motors is 8 mm (0.31"). This range is limited to 4 mm by the Stage.
  • Preconfigured with DRV001 Stepper Motor Actuators for Automated Alignments
  • Available with or Without Internal Closed-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows Drives to be Removed and Replaced
  • All Adjusters Tied to a Common Ground and Side Mounted
  • PAA622 Piezo Feedback Cables are Included with the MAX341(/M) Stage

Thorlabs' NanoMax Stages with Stepper Motor Actuators provide 4 mm (0.16") of travel and are capable of 60 nm step increments with a minimum incremental movement of 60 nm. They also provide bidirectional repeatability of 500 nm. Ceramic-tipped high-precision limit switches provide a high repeatability ideal for homing the motors. This is critical for auto alignment applications that rely on a highly repeatable zero point. The high repeatability and small step size make these stages ideal for any high-precision automated fiber launch system or general application. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators.

In addition to the features above, the MAX341 NanoMax Stage offers closed-loop piezoelectric actuators that have a 20 µm travel range. The closed-loop piezo actuators have strain gauge displacement sensors that provide a feedback signal allowing for a resolution up to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX341 Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available / Ships
MAX343 Support Documentation
MAX3433-Axis NanoMax Stage, Stepper Motors
$2,430.00
Today
MAX341 Support Documentation
MAX3413-Axis NanoMax Stage, Stepper Motors, Closed-Loop Piezos
$3,650.00
Lead Time
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX343/M Support Documentation
MAX343/M3-Axis NanoMax Stage, Stepper Motors, Metric
$2,430.00
Today
MAX341/M Support Documentation
MAX341/M3-Axis NanoMax Stage, Stepper Motors, Closed-Loop Piezos, Metric
$3,650.00
Today

3-Axis NanoMax Stage

Flexure Stage
Click to Enlarge

MAX301 with a Stepper Motor, Thumbscrew, and Differential Actuator Attached to the X, Y, and Z Axis, Respectively
Item #MAX303(/M)MAX302(/M)MAX301(/M)
Internal Piezo Actuatorsa
Control N/A Open Loop Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 20 nm 5 nm
Bidirectional Repeatability 200 nm 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Please see the Specs Tab for Complete Piezo Specifications
  • No Preinstalled Actuators
  • Available With or Without Internal Closed- or Open-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows for a Variety of Drive Options (See Drives Tab for Details)
  • All Adjusters Tied to a Common Ground and Side Mounted
  • PAA622 Piezo Feedback Cables are Included with the MAX301(/M) Stage

Thorlabs' NanoMax Stages Without Included Actuators are ideal for customizing the type of drive that will be installed on each axis. This allows each axis to be configured depending on the precision or automation needed. Whether the application is a multimode fiber launch system using thumbscrews or an automated alignment setup using stepper motor actuators, each axis can be configured to meet the demand. For a list of all compatible actuators, please see the Drives tab.

In addition to the features above, the MAX302 and MAX301 NanoMax Stages offer open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX301 Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available / Ships
MAX303 Support Documentation
MAX3033-Axis NanoMax Stage, Actuators Not Included
$910.00
Today
MAX302 Support Documentation
MAX3023-Axis NanoMax Stage, Actuators Not Included, Open-Loop Piezos
$1,260.00
Today
MAX301 Support Documentation
MAX3013-Axis NanoMax Stage, Actuators Not Included, Closed-Loop Piezos
$2,150.00
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX303/M Support Documentation
MAX303/M3-Axis NanoMax Stage, Actuators Not Included, Metric
$910.00
Today
MAX302/M Support Documentation
MAX302/M3-Axis NanoMax Stage, Actuators Not Included, Open-Loop Piezos, Metric
$1,260.00
Today
MAX301/M Support Documentation
MAX301/M3-Axis NanoMax Stage, Actuators Not Included, Closed-Loop Piezos, Metric
$2,150.00
Today

Tapped Top Plates


Click to Enlarge

RB13P1 Top Plate Shown Replacing the MMP1 Crossed Groove Mounting Plate on a Flexure Stage
Item #RB13P1RB13P1/MMMP1MMP1/M
Mechanical
Drawing
  • RB13P1 Adapter Plate for General Purpose Accessories and Components
    • Array of Thirteen 1/4"-20 (M6) and Twelve 8-32 (M4) Tapped Mounting Holes
  • MMP1 Standard 3-Axis Stage Top Plate (Included with All 3-Axis Stages)
    • Two 3 mm Wide Central Keyways for Aligning Multi-Axis Stage Accessories
    • Sixteen 6-32 (M3) Taps for Mounting Cleats
    • Four 4-40 (M2) Taps
    • Nine 8-32 (M4) Taps

The RB13P1(/M) Adapter Plate is designed as a replacement option for the standard MMP1(/M) grooved top plate sold with the stages above. Four counterbores that accept 6-32 (M3) screws allow it to be attached to the above stages. The 2.36" x 2.36" (60 mm x 60 mm) mounting surface is the same as the MMP1(/M) top plate that is included with the above stages. For complete details on the dimensions and tap locations of this top plate, please see the mechanical drawings below.

The MMP1(/M) Top Plate is included with the stages sold above but can be purchased separately as well. This plate features two 3 mm wide central keyways in a crossed pattern to allow for rapid configuration while maintaining accessory alignment, making this plate ideal for fiber launch applications. This "crossed groove" design allows for the NanoMax stages to be used in a left- or right-handed configuration. The plate also contains an array of 4-40 (M2), 6-32 (M3), and 8-32 (M4) tapped mounting holes for securing and mounting various components. For complete details on the dimensions and tap locations of this plate, please see the mechanical drawings below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available / Ships
RB13P1 Support Documentation
RB13P1Adapter Plate with 1/4"-20 and 8-32 Taps
$49.90
Today
MMP1 Support Documentation
MMP1Replacement Mounting Plate for Flexure Stages
$71.40
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
RB13P1/M Support Documentation
RB13P1/MAdapter Plate with M6 and M4 Taps
$49.90
Today
MMP1/M Support Documentation
MMP1/MReplacement Mounting Plate for Flexure Stages, Metric
$71.40
3-5 Days
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