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3-Axis NanoMax Flexure Stages


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3-Axis NanoMax Flexure Stages

Flexure StageClick to Enlarge
3-Axis Flexure Stage Mounted Directly to a PY004 High-Load Pitch and Yaw Stage for 5-Axis Control
Common Specificationsa
Travel4 mm
Travel MechanismParallel Flexure
Deck Height (Nominal)62.5 mm (2.46")
Optical Axis Height (Nominal)75 mm (2.95")
Load Capacity (Max)1 kg (2.2 lbs)
Load Capacity (Recommended)<0.7 kg (<1.54 lbs)
Thermal Stability1 µm/°C
Parallelism of Top Plate<100 µm
Top Plate
Mounting

Holes
Imperial Plate
(Item # MMP1)
Metric Plate
(Item # MMP1/M)
  • Please see the Specs Tab for Complete Specifications

Features

  • 4 mm of X, Y, and Z Travel
  • Flexure Design Ensures Smooth Continuous Motion and Long-Term Stability
  • Grooved Top Plate Ensures Alignment of Multi-Axis Stage Accessories
  • Compact Size Measuring 112.0 mm x 112.0 mm (4.41" x 4.41") Without Drives
  • All Adjusters Coupled to the Base to Minimize Crosstalk
  • Piezo Options Provide up to 5 nm Resolution in Closed Loop
  • Modular Design for Interchanging Actuators

Thorlabs' 3-axis NanoMax Flexure Stages are ideal for use in fiber launch systems or applications that require sub-micron resolution. The parallel flexure design ensures precise, smooth, continuous motions with negligible friction. Each unit provides 4 mm (0.16") of X, Y , and Z travel with a maximum load capacity of 1 kg (2.2 lbs). The nominal deck height of the stage is 62.5 mm (2.46"), which matches that of our 3-Axis MicroBlock compact flexure stages and RollerBlock long travel stages. Adapter plates are available for mounting our NanoMax stages to a wide range of other Thorlabs rotation and long travel linear stages.

Precision Drives
The modular design of our 3-axis NanoMax stages allows the drives to be removed and replaced at any time. For all of our compatible drive options, please see the Drives tab. Pre-configured stages are also offered that have differential micrometers or stepper motor actuators for out-of-the-box manual or motorized operation, respectively. All drives are coupled directly to the base to minimize any unwanted motion in the system. This feature is ideal for any application requiring sub-micron resolution. For nanopositioning applications we have versions with internal piezoelectric actuators.

Flexure StageClick to Enlarge
HCS013 Objective Mount and HFF001 Quick-Release Fiber Clamp Accessories Attached to the Top Plate Using AM010 Cleats for Fiber Launch Applications

Piezo Options
The option for open- or closed-loop piezos allows these stages to achieve nanometer resolution. The piezoelectric actuators are built into the stage, have 20 µm of travel, and can be controlled using many of our open- or closed-loop piezo controllers (see the Specs tab for all compatible controllers). When these stages are coupled with a NanoTrak controller (BNT001/IR, MNA601/IR, or TNA001/IR), the system becomes a powerful auto-alignment solution that maintains optical throughput and eliminates coupling efficiency loss due to thermal drift or other external forces.

Flexure Stage
Click to Enlarge

Piezo and Feedback Connections

Stages with open-loop piezo actuators do not have a strain gauge displacement sensor and are ideal for applications requiring positioning resolution down to 20 nm. Versions with closed-loop piezo actuators have internal strain gauge displacement sensors that provide a feedback voltage signal that is linearly proportional to the displacement of the piezoelectric element. This feedback signal increases the resolution to 5 nm and can be used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements, making these stages an excellent choice for applications requiring nanometer resolution.

Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support.

Easy Alignment of Accessories
Two central keyways in the top platform allow for rapid system reconfiguration while maintaining accessory alignment (see the image above and to the left). The crossed pattern allows for changing the orientation of the stage for right- and left-handed use. A wide range of accessories is available to mount items such as microscope objectives, collimation packages, wave guides, fiber, and much more. If options are required for off-center mounting of components, the grooved top plate can be replaced with the RB13P1 adapter plate (sold at the bottom of this page), which has an array of 1/4"-20 (M6) and 8-32 (M4) mounting holes.

Stage Specifications

Item #MAX313D(/M)MAX312D(/M)MAX311D(/M)MAX343(/M)MAX341(/M)MAX303(/M)MAX302(/M)MAX301(/M)
Included DrivesDRV3 Differential Micrometer DrivesDRV001 Stepper Motor ActuatorsN/A
Travel4 mm
Deck Height (Nominal)62.5 mm (2.46")
Optical Axis Height (Nominal)75 mm (2.95")
Load Capacity (Max)1 kg (2.2 lbs)
Recommended Load Capacity<0.7 kg (<1.54 lbs)
Thermal Stability1 µm/°C
Parallelism of Top Plate<100 µm
Piezo Specifications
ControlN/AOpen LoopClosed LoopN/AClosed LoopN/AOpen LoopClosed Loop
Drive Voltage Range0 - 75 V0 - 75 V0 - 75 V
Range20 µm20 µm20 µm
Capacitance3.6 µF3.6 µF3.6 µF
Theoretical Resolution20 nm5 nm5 nm20 nm5 nm
Bidirectional Repeatability0.2 µm0.05 µm0.05 µm0.2 µm0.05 µm
Absolute On-Axis Accuracy1.0 µm1.0 µm1.0 µm
Resonant Frequency
(No Load)
375 Hz375 Hz375 Hz
Resonant Frequency
with 275 g (9.7oz) Load
200 Hz200 Hz200 Hz
Resonant Frequency
with 575 g (20.3oz) Load
150 Hz150 Hz150 Hz
Compatible Piezo ControllersBPC303
MDT693B
MPZ601
TPZ001
BPC303
MPZ601
TPZ001 with TSG001
MNA601/IR
BNT001/IR
TNA001/IR
BPC303
MDT693B
MPZ601
TPZ001
BPC303
MDT693B
MPZ601
TPZ001
BPC303
MPZ601
TPZ001with TSG001
MNA601/IR
BNT001/IR
TNA001/IR

Stepper Motor Specifications

Item #DRV001
Backlash<7 µm
Max Acceleration4 mm/s2
Velocity Range40 µm/sec - 4 mm/s
Voltage Stability±0.04 mm/s
Min Achievable Incremental Movement60 nm
Bidirectional Repeatability500 nm
Home Location Accuracy± 1.5 µm
PitchX-Axis: 0.015°
Y-Axis: 0.015°
Z-Axis: 0.0047°
YawX-Axis: 0.0034°
Y-Axis: 0.0034°
Z-Axis: 0.0032°
Limit SwitchesCeramic Tip Mechanical
Manual Over RideYes
Compatible Stepper Motor ControllersBSC203
MST602

Differential Micrometer Specifications

Item #DRV3
Travel Range8 mm (0.31") Coarse, 300 µm Fine
Resolution5.0 µm Coarse, 0.5 µm Fine
Coarse Adjustment (with Vernier Scale)500 µm/rev
Fine Adjustment (with Vernier Scale)50 µm/rev

Arcuate Cross Talk Specifications

The measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The table below shows the theoretical amount of cross talk to the Z axis, for movement at various X positions (Y axis at zero). Cross talk at Y axis positions (with X at zero) would be the same.

X Axis Position (mm)0.00.51.01.52.02.53.03.54.0
Arcuate Motion in Z Axis (µm)80.045.020.05.00.05.020.045.080.0

The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
The table below shows the typical amount of cross talk to the X axis, for movement at various Z axis positions (Y axis at zero). Cross talk to Y axis positions (with X axis at zero) would be the same.

Z Axis Position (mm)0.00.51.01.52.02.53.03.54.0
Arcuate Motion in X Axis (µm)57.132.114.33.60.03.614.332.157.1
Removing the Actuators
Installing a DRV003 Micrometer
Click to Enlarge

Step 2
Unscrew the Knurled Knob and Remove the Actuator
Installing a DRV003 Micrometer
Click to Enlarge

Step 1
Rotate the Actuator Counterclockwise to Disengage the Actuator from the Platform

Modular Drive Options

All 3-Axis NanoMax system have a modular design that allows the drives to be removed and replaced at any time. This allows for mix-and-match customization of actuators depending on the amount of automation or resolution needed on each axis.

Replacing a drive is simple and can be done in three steps. First, retract the leadscrew of the actuator until it is no longer engaging the moving body of the stage. Then unscrew the knurled knob attaching the existing drive to the stage. Finally, attach the new drive to the stage using the same knurled knob.

The drives compatible with our 3-axis NanoMax stages are summarized below. Some drives have limited travel range when used with the NanoMax 3-axis flexure stages; see the table for more details. For more detailed information on each drive, please see the full presentation for our Stepper Motor Drive, Differential Micrometers and Thumbscrew Drives, or In-line Piezo Actuators.

Item #DRV004DRV3DRV001DRV120DRV181
Click Image
to Enlarge
DRV004DRV3DRV001DRV120DRV181
Actuator TypeThumbscrewDifferential MicrometeraStepper MotorbPiezoelectric with FeedbackExtended Range Piezoelectric
Travel Range8 mm (0.31")cCoarse: 8 mm (0.31")c
Fine: 300 µm
8 mm (0.31")c20 µm80 µm
Adjustment500 µm/revolutionCoarse: 500 µm/revolution
Fine: 50 µm/revolution
-
Resolution1.0 µmCoarse: 5.0 µm
Fine: 0.5 µm
60 nm/step
200 steps/rev of Leadscrew
5 nmd20 nm
Compatible Controllers-Benchtop: BSC200 Series
Rack Module: MST602
Benchtop: BPC300 Series
Rack Mount: MPZ601
T-Cubes: TPZ001 with TSG001
Benchtop: BPC300 Series
Rack Mount: MPZ601
T-Cube: TPZ001
  • Included with MAX311D(/M), MAX312D(/M), and MAX313D(/M) Stages
  • Included with the MAX341(/M) and MAX343D(/M) Stepper-Motor-Actuated Stages
  • Range Limited to 4 mm (0.16") by the NanoMax Stage
  • Closed Loop

Displacement Sensor

7-Pin LEMO Male

MAX311D/MAX341/MAX301

LEMO Male

PinDesignation
1+15 V
2Oscillator +
30 V
4Signal Out -
5Signal Out +
6-15 V
7Travel

Piezo Drive Input

SMC Male

MAX311D/MAX312D/MAX341/MAX301/MAX302

SMA Male

Nominal Maximum Input Voltage: 75 V
Absolute Maximum Input Voltage: 100 V

DRV001 Stepper Motor Connector Pins

D-Type Male

MAX341/MAX343

DB15 Male

PinDescriptionPinDescription
1Limit Switch Ground6Motor Phase A-
2Not Connected7Motor Phase A+
3CW Limit Switch8 to 14Reserved for Future Use
4Motor Phase B-
5Motor Phase B+15Earth GND

Thorlabs offers three different 3-Axis stage variations: NanoMax flexure stages, MicroBlock compact flexure stages, and RollerBlock long-travel stages. Our NanoMax line of 3-axis stages offers built-in closed- and open-loop piezos as well as modular drive options that include stepper motors, differential drives, or additional piezos. Our RollerBlock stage drivers can be switched out for any actuator that has a Ø3/8" (9.5 mm) mounting barrel.

Thorlabs' 4- and 5-axis platforms have nominal heights of 62.5 mm and 112.5 mm, depending on the platform chosen, for compatibility with our 3- and 6-axis stages, respectively. To increase the stage height of the 3-axis stages to 112.5 mm, we recommend our AMA554 Height Adapter. Our 4- and 5-axis platforms are ideal for the static positioning of waveguides or complex optical elements with respect to our 3- or 6-axis high-performance alignment stages. They are not designed for optimizing the coupling efficiency of the system; this should be accomplished by using the 3- or 6-axis stages to position the input/output device.

Thorlabs' 6-Axis NanoMax Nanopositioners are ideal for complex, multi-axis positioning. These stages offer a common point of rotation and a patented parallel flexure design that allows all actuators to be connected to a common ground. Built-in closed- and open-loop piezo options are available. A selection of modular drive options allows any axis to be manual or motorized with the option for external piezos. Our units without included actuators are also available in right- or left-handed configurations.

 

3-Axis Stages

Item #MAX313DMAX312DMAX311DMAX343MAX341MAX303MAX302MAX301MBT602MBT616DRB13MRBL13D
Stage TypeNanoMax Flexure StagesMicroBlock Compact
Flexure Stages
RollerBlock Long Travel Stages
Included DrivesDRV3 Differential MicrometerDRV001 Stepper Motor Actuators-Fine Thread ThumbscrewDifferential Micrometer148-801ST Micrometer DrivesDRV304 Differential Micrometer
Built-in Piezos-Open
Loop
Closed Loop-Closed Loop-Open LoopClosed Loop--
Travel4 mm13 mm
Deck Height (Nominal)62.5 mm (2.46")
Optical Axis Height (Nominal)75 mm (2.95")
Load Capacity (Max)1 kg (2.2 lbs)4.4 kg (9.7 lbs)
Thermal Stability1 µm/°C-
Weight1.00 kg (2.20 lbs)0.64 kg (1.40 lbs)0.59 kg (1.30 lbs)

5-Axis Stages

4-Axis Stages

Item #MBT401MBT402NBM413
Stage Type4-Axis Thin-Profile MicroBlock Device Platform4-Axis Low-Profile MicroBlock Device Platform4-Axis NanoBlock Device Platform
Included DrivesDifferential ActuatorsDifferential Micrometer
Built-in PiezosN/A
TravelHorizontal Axis (Y)a13 mm
Vertical Axis (Z)6 mm
Pitch (θY)±5°±4°
Yaw (θZ)±5°±4°
Deck Height (Nominal)62.5 mm (2.46")112.5 mm (4.43")
Optical Axis Height (Nominal)75 mm (2.95")125 mm (4.92")
Load Capacity (Max)0.5 kg (1.1 lbs)
  • Perpendicular to the Optical Axis (X)
Item #NBM513PY005
Stage Type5-Axis NanoBlock Device PlatformCompact 5-Axis Platform
Included DrivesDifferential Micrometers100 TPI Actuators
Built-in PiezosN/A
TravelOptical Axis (X)13 mm3 mm
Horizontal Axis (Y)13 mm3 mm
Vertical Axis (Z)6 mm3 mm
Pitch (θY)±4°±3.5°
Yaw (θZ)±4°±5°
Deck Height (Nominal)112.5 mm (4.43")62.5 mm (2.46")a
Optical Axis Height (Nominal)125 mm (4.92")75 mm (2.95")a
Load Capacity (Max)0.5 kg (1.1 lbs)0.23 kg (0.5 lbs)
  • Nominal deck height of 62.5 mm and optical axis height of 75 mm can only be achieved using the PY005A2 Height Adapter and MMP1 Mounting Plate.

6-Axis Stages

Item #MAX601D
MAX601D/M
MAX602D
MAX602D/M
MAX603D
MAX603D/M
MAX604
MAX604/M
MAX605
MAX605/M
MAX606
MAX606/M
MAX607
MAX607/M
MAX607La
MAX607L/Ma
MAX608
MAX608/M
MAX608La
MAX608L/Ma
MAX609
MAX609/M
MAX609La
MAX609L/Ma
Stage Type6-Axis NanoMax Flexure Stage
Included DrivesDRV3 Differential MicrometerDRV001 Stepper Motor Actuators-
Built-in Piezos-Open LoopClosed Loop-Open LoopClosed Loop-Open LoopClosed Loop
TravelOptical Axis (X)4 mm
Horizontal Axis (Y)4 mm
Vertical Axis (Z)4 mm
Roll (θX)
Pitch (θY)
Yaw (θZ)
Deck Height (Nominal)112.5 mm (4.43")
Optical Axis Height (Nominal)125 mm (4.92")
Load Capacity (Max)1.0 kg (2.2 lbs)
  • Left-Handed Version
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Posted Comments:
Poster: wjwjfwjf
Posted Date: 2009-09-27 07:45:32.0
The service is a little slow.
Poster: jens
Posted Date: 2009-05-25 09:50:16.0
A response from Jens at Thorlabs: Dear Hamit, I am sorry that you are encountering difficulties with the product. We will need additional information regarding driver electronics and load so that we can resolve this as soon as possible. I will contact you via your email directly.
Poster: hamitkal
Posted Date: 2009-05-25 07:58:21.0
Dear Sir, We are using Nanomax-TS Max 342 translation stage in our lab and the scanning motor heats up and it stops after a while and this undermines our experiment and is very annoying. We need your attention to this matter immediately. Regards, Hamit Kalaycioglu Bilkent University, Turkey
Poster: Laurie
Posted Date: 2009-02-05 15:27:44.0
Response from Laurie at Thorlabs to melsscal: our MAX313/M can only obtain 20 nm piezo resolution when using piezo controllers. To control the piezos, we commonly recommend the BPC203 controller, although there are other options available too (BNT001, TPZ001 etc). Please let us know if you have additional questions.
Poster: melsscal
Posted Date: 2009-02-05 03:37:28.0
1. Can you please confirm whether MAX313/M be operated manually within 20nm Piezo resolution (i.e. w/o using any Piezo controllers) ? 2.Can you please suggest a suitable controller for MAX313/M to acieve 5nm piezo resolution ? Regards A.K.Bose
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3-Axis NanoMax Stage with Differential Adjusters
Item # MAX313D(/M) MAX312D(/M) MAX311D(/M)
Manual Drive Specifications
Item # DRV3
Travel Range Coarsea 4 mm (0.16")
Fine 300 µm Fine
Resolution Coarse 5.0 µm
Fine 0.5 µm
Coarse Adjustment
(with Vernier Scale)
500 µm/rev
Fine Adjustment
(with Vernier Scale)
50 µm/rev
Piezo Specificationsb
Control N/A Open Loop Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 20 nm 5 nm
Bidirectional Repeatability 200 nm 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Full coarse travel range of the DRV3 Differential Actuator is 8 mm (0.31"). This range is limited to 4 mm by the Stage.
  • Please see the Specs Tab for Complete Piezo Specifications
  • Preconfigured with DRV3 Differential Micrometers for Manual Adjustments
  • Available With or Without Internal Closed- or Open-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows Drives to be Removed and Replaced
  • All Adjusters Tied to a Common Ground and Side Mounted
  • Ideal for Use in Professional Fiber Launch Systems
  • PAA622 Piezo Feedback Cables are Included with the MAX311D(/M) Stage

Thorlabs' NanoMax Stages with Differential Adjusters provide 4 mm (0.16") of coarse travel and 300 µm of fine travel. The coarse adjuster has a Vernier scale with 10 µm graduations for a resolution of 5 µm. The fine adjuster has a Vernier scale with 1 µm graduations allowing for a resolution of 0.5 µm. This resolution and travel range make these stages ideal for optimizing the coupling efficiency in a fiber alignment or waveguide positioning system. The graduations also allow for a clear reference point for absolute positioning within a system. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators.

5 Axis Mount with Flexure Stage
Click to Enlarge

MAX313D 3-Axis Stage with a PY005 5-Axis Stage, PY005A2 Base, and MMP1 Top Plate for Fiber Coupling

In addition to the features above, the MAX312D and MAX311D NanoMax Stages incorporate open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX311D Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX313D Support Documentation
MAX313D NanoMax300 with Differential Drives, No Piezos
$1,552.03
Today
MAX312D Support Documentation
MAX312D NanoMax300 with Differential Drives and Piezos
$2,039.72
Today
MAX311D Support Documentation
MAX311D Closed-Loop 3-Axis NanoMax Stage w/ Differential Drives and Piezos
$2,807.84
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX313D/M Support Documentation
MAX313D/M NanoMax300 with Differential Drives, No Piezos, Metric
$1,552.03
Today
MAX312D/M Support Documentation
MAX312D/M NanoMax300 with Differential Drives and Piezos, Metric
$2,039.72
Today
MAX311D/M Support Documentation
MAX311D/M Closed-Loop 3-Axis NanoMax Stage w/ Differential Drives and Piezos, Metric
$2,807.84
Today
3-Axis NanoMax Stage with Stepper Motor Actuators
Item # MAX343(/M) MAX341(/M)
Stepper Motor Drive Specificationsa
Item # DRV001
Travel Rangeb 4 mm (0.16")
Min Incremental Movement 60 nm
Velocity Range 40.0 µm/s to 4 mm/s
Max Acceleration 4 mm/s2
Compatible Drivers BSC203 and MST602
Piezo Specificationsa
Control N/A Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 5 nm
Bidirectional Repeatability 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Please see the Specs Tab for Complete Stepper Motor and Piezo Specifications
  • Full travel range of the DRV001 Stepper Motors is 8 mm (0.31"). This range is limited to 4 mm by the Stage.
  • Preconfigured with DRV001 Stepper Motor Actuators for Automated Alignments
  • Available with or Without Internal Closed-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows Drives to be Removed and Replaced
  • All Adjusters Tied to a Common Ground and Side Mounted
  • PAA622 Piezo Feedback Cables are Included with the MAX341(/M) Stage

Thorlabs' NanoMax Stages with Stepper Motor Actuators provide 4 mm (0.16") of travel and are capable of 60 nm step increments with a minimum incremental movement of 60 nm. They also provide bidirectional repeatability of 500 nm. Ceramic-tipped high-precision limit switches provide a high repeatability ideal for homing the motors. This is critical for auto alignment applications that rely on a highly repeatable zero point. The high repeatability and small step size make these stages ideal for any high-precision automated fiber launch system or general application. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators.

In addition to the features above, the MAX341 NanoMax Stage offers closed-loop piezoelectric actuators that have a 20 µm travel range. The closed-loop piezo actuators have strain gauge displacement sensors that provide a feedback signal allowing for a resolution up to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX341 Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX343 Support Documentation
MAX343 3-Axis NanoMax, Stepper Motors
$2,355.00
Today
MAX341 Support Documentation
MAX341 3-Axis NanoMax, Closed-Loop Piezo and Stepper Motors
$3,540.00
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX343/M Support Documentation
MAX343/M 3-Axis NanoMax with Stepper Motors
$2,355.00
Today
MAX341/M Support Documentation
MAX341/M 3-Axis NanoMax, Closed-Loop Piezo and Stepper Motors
$3,540.00
3-5 Days
3-Axis NanoMax Stage
Flexure Stage
Click to Enlarge

MAX301 with a Stepper Motor, Thumbscrew, and Differential Actuator Attached to the X, Y, and Z Axis, Respectively
Item # MAX303(/M) MAX302(/M) MAX301(/M)
Internal Piezo Actuatorsa
Control N/A Open Loop Closed Loop
Voltage Range 0 - 75 V
Travel Range 20 µm
Theoretical Resolution 20 nm 5 nm
Bidirectional Repeatability 200 nm 50 nm
Absolute On-Axis Accuracy 1.0 µm
  • Please see the Specs Tab for Complete Piezo Specifications
  • No Preinstalled Actuators
  • Available With or Without Internal Closed- or Open-Loop Piezos
  • Piezo Actuators Offer 20 µm of Travel
  • Modular Design Allows for a Variety of Drive Options (See Drives Tab for Details)
  • All Adjusters Tied to a Common Ground and Side Mounted
  • PAA622 Piezo Feedback Cables are Included with the MAX301(/M) Stage

Thorlabs' NanoMax Stages Without Included Actuators are ideal for customizing the type of drive that will be installed on each axis. This allows each axis to be configured depending on the precision or automation needed. Whether the application is a multimode fiber launch system using thumbscrews or an automated alignment setup using stepper motor actuators, each axis can be configured to meet the demand. For a list of all compatible actuators, please see the Drives tab.

In addition to the features above, the MAX302 and MAX301 NanoMax Stages offer open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. PAA622 Piezo Feedback Cables are included with the MAX301 Stage.

Imperial stages come with an MMP1 Top Plate, while metric stages come with an MMP1/M Top Plate. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
MAX303 Support Documentation
MAX303 3-Axis, NanoMax, 4 mm Travel, No Piezo
$883.00
Today
MAX302 Support Documentation
MAX302 3-Axis, NanoMax, 4 mm Travel, Internal Piezo No Feedback
$1,220.00
Today
MAX301 Support Documentation
MAX301 3-Axis, NanoMax, 4 mm Travel, Internal Piezo & Feedback
$2,085.00
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
MAX303/M Support Documentation
MAX303/M 3-Axis, NanoMax, 4 mm Travel, No Internal Piezo, Metric
$883.00
Today
MAX302/M Support Documentation
MAX302/M 3-Axis, NanoMax, 4 mm Travel, Internal Piezo, Metric
$1,220.00
Today
MAX301/M Support Documentation
MAX301/M 3-Axis, NanoMax, 4 mm Travel, Internal Piezo & Feedback, Metric
$2,085.00
Today
Tapped Top Plates

Click to Enlarge

RB13P1 Top Plate Shown Replacing the MMP1 Crossed Groove Mounting Plate on a Flexure Stage
Item # RB13P1 RB13P1/M MMP1 MMP1/M
Mechanical
Drawings
  • RB13P1 Adapter Plate for General Purpous Accessories and Components
    • Array of Thirteen 1/4"-20 (M6) and Twelve 8-32 (M4) Tapped Mounting Holes
  • MMP1 Standard 3-Axis Stage Top Plate (Included with All 3-Axis Stages)
    • Two 3 mm Wide Central Keyways for Aligning Multi-Axis Stage Accessories
    • Sixteen 6-32 (M3) Taps for Mounting Cleats
    • Four 4-40 (M2) Taps
    • Nine 8-32 (M4) Taps

The RB13P1(/M) Adapter Plate is designed as a replacement option for the standard MMP1(/M) grooved top plate sold with the stages above. Four counterbores that accept 6-32 (M3) screws allow it to be attached to the above stages. The 2.36" x 2.36" (60 mm x 60 mm) mounting surface is the same as the MMP1(/M) top plate that is included with the above stages. For complete details on the dimensions and tap locations of this top plate, please see the mechanical drawings below.

The MMP1(/M) Top Plate is included with the stages sold above but can be purchased separately as well. This plate features two 3 mm wide central keyways in a crossed pattern to allow for rapid configuration while maintaining accessory alignment, making this plate ideal for fiber launch applications. This "crossed groove" design allows for the NanoMax stages to be used in left- or right-handed configuration. The plate also contains an array of 4-40 (M2), 6-32 (M3), and 8-32 (M4) tapped mounting holes for securing and mounting various components. For complete details on the dimensions and tap locations of this plate, please see the mechanical drawings below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
RB13P1 Support Documentation
RB13P1 Adapter Plate with 1/4"-20 and 8-32 Taps
$48.40
Today
MMP1 Support Documentation
MMP1 Replacement Mounting Plate for Flexure Stages
$69.36
Today
+1 Qty Docs Part Number - Metric Price Available / Ships
RB13P1/M Support Documentation
RB13P1/M Adapter Plate with M6 and M4 Taps
$48.40
Today
MMP1/M Support Documentation
MMP1/M Replacement Mounting Plate for Flexure Stages, Metric
$69.36
Today
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