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Modular Piezoelectric Actuators


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Modular Piezoelectric Actuators

These piezo actuators are designed to add additional travel range and control to our NanoMax™ Flexure Stages (DRV001, DRV3, or DRV004) . In addition, when used with our Modular Quick-Connect Adapters, they can be fitted to any of our stages accepting a Ø9.5 mm (Ø3/8") or Ø10 mm (Ø.39") mounting barrel. These externders are ideal for applications requiring high-resolution movements over a small range. The DRV120 offers 20 µm of travel with feedback position sensing. The DRV181 offers 80 µm of travel without feedback and provides a convenient electrical parallel feedthrough for daisy chaining multiple piezo extenders together using a single controller if bandwidth is not a significant factor.

The piezo actuators fit between the stage and existing actuator (see diagram below). A DRV3 differential actuator is shown in the example below.

mod

DRV120a
Travel20 µm
Piezo Voltage0 - 75 V
Resolution5 nmb
Feedback (DRV120)Strain Gauge
Capacitance7.2 µF
Compatible ControllersBPC301
MPZ601
TPZ001 Combined with TSG001
DRV181
Travel80 µm
Piezo Voltage0 - 75 V
Piezo Blocking Force1000 N
Resolution20 nm
Capacitance40 µF ± 30%
Compatible ControllersBPC301
MPZ601
MDT693A
TPZ001
  • The DRV120, as well as all other closed-loop piezo actuators and stages, includes a PAA622 piezo control cable.
  • Closed Loop

Strain Gauge Pin Out

Strain Gauge Pin Out

PinDesignation
1+ 15 V
2Oscillator +
30 V
4Signal Out -
5Singal In +
6- 15 V
7Travel

Piezo Inputs

SMC

SMC

0 - 75 V

Piezo Driver Bandwidth Tutorial

Knowing the rate at which a piezo is capable of changing lengths is essential in many high-speed applications. The bandwidth of a piezo controller and stack can be estimated if the following is known:

  1. The maximum amount of current the controllers can produce. This is 0.5 A for our BPC Series Piezo Controllers, which is the driver used in examples below.
  2. The load capacitance of the piezo. The higher the capacitance, the slower the system.
  3. The desired signal amplitude (V), which determines the length that the piezo extends.
  4. The absolute maximum bandwidth of the driver, which is independent of the load being driven.

To drive the output capacitor, current is needed to charge it and to discharge it. The change in charge, dV/dt, is called the slew rate. The larger the capacitance, the more current that is needed.

Piezo Equation 1

So for example, for a 100 µm stack, having a capacitance of 20 µF, being driven by a BPC Series piezo controller with a maximum current of 0.5 A, the slew rate is given by

Piezo Equation 2

Hence, for an instantaneous voltage change from 0 V to 75 V, it would take 3 ms for the output voltage to reach 75 V.

Note: For these calculations, it is assumed that the absolute maximum bandwidth of the driver is much higher than the bandwidths calculated, and thus, driver bandwidth is not a limiting factor. Also please note that these calculations only apply for open-loop systems. In closed-loop mode, the slow response of the feedback loop puts another limit on the bandwidth.

Sinusoidal Signal

The bandwidth of the system usually refers to the system's response to a sinusoidal signal of a given amplitude. For a piezo element driven by a sinusoidal signal of peak amplitude A, peak-to-peak voltage Vpp, and frequency f, we have:

Piezo Equation 3

A diagram of voltage as a function of time is shown to the right. The maximum slew rate, or voltage change, is reached at t = 2nπ, (n=0, 1, 2,...) at point a in the diagram to the right:

Piezo Equation 4

From the first equation, above:

Piezo Equation 5

Thus,
Piezo Equation 6

For the example above, the maximum full-range (75 V) bandwidth would be:

Piezo Equation 7

For a smaller piezo stack with 10 times lower capacitance, the results would be 10 times better, or about 1060 Hz. Or, if the peak-to-peak signal is reduced to 7.5 V (10% max amplitude) with the 100 µm stack, again, the result would be 10 times better at about 1060 Hz.

Triangle Wave Signal

For a piezo actuator driven by a triangle wave of max voltage Vpeak and minimum voltage of 0, the slew rate is equal to the slope, or:

Piezo Equation 8

or, since f = 1/T:

Equation 9

Square Wave Signal

For a piezo actuator driven by a square wave of max voltage Vpeak and minimum voltage of 0, the slew rate limits the minimum rise and fall time. In this case, the slew rate is equal to the slope while the signal is rising or falling. If tr is the minimum rise time, then:

Equation 11

or

Equation 12

 

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