Video Measurement System, Multisensor


  • High-Speed, Non-Contact 3-Axis Coordinate Measurement
  • Superior Stability and Accuracy from Granite Base and Gantry
  • Multisensor: Video, Touch, and Laser Sensors
  • High-Accuracy Air or Mechanical Bearings

VSA463

Video Measurement System
305 mm x 305 mm x 200 mm Range
Shown with Coaxial Light and Touch Probe

VSA713

Video Measurement System
711 mm x 610 mm x 200 mm Range
Shown with Adjustable Quadrant Light

Related Items


Please Wait

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please use the Contact Me button below and to the left. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

In the Budgetary Phase?

System prices vary based on the exact components. Through our conversations, we can ensure your system quote is tailored to your requirements.

OEM or Custom Projects?

Click here to learn about our OEM capabilities.

Thorlabs Measurment Systems Manager
Ike Jariel
General Manager
Thorlabs Measurement Systems

I'm Happy to Assist!

Contact Us Button

Want a System Demo?

Contact us to demo a system in our showroom or remotely.

Inspection Applications

  • Circuit Boards
  • Electronics
  • Semiconductors
  • Computer Components
  • Manufacturing
  • Solar Panels
  • Gaskets
  • Stampings
  • Medical Devices

Features

  • XYZ Measuring Range Options:
    • 305 mm x 305 mm x 200 mm (Linear Motor)
    • 305 mm x 460 mm x 200 mm (Linear or Servo Motor)
    • 610 mm x 711 mm x 200 mm (Linear or Servo Motor)
    • 760 mm x 965 mm x 200 mm (Linear Motor)
    • 915 mm x 1270 mm x 200 mm (Linear Motor)
  • All Systems Offer CNC and Manual Operation
  • High-Resolution Video Sensors for High-Contrast Imaging
  • Laser and Tactile Probes for Multisensor Metrology
  • Multiple LED Options to Highlight Surface and Edge Features
  • Stable Granite Base Ensures High Accuracy and Repeatability
  • Floor-Standing, Ergonomic Workstation for Simple and Convenient Operation
  • Advanced, Feature-Rich M3 MetLogix®a Metrology Control Software
This video outlines the features, options, and accessories for our line of VideoMic® video measurement systems.

Build Your Coordinate Measuring Machine

  • Select a Base System (Required, See Base Systems tab for Details)
  • Select Video System Options (Required, See Video Configurations tab for Details)
    • Camera, Zoom Lens, Lighting, and Software
  • Select Additional Sensors and Accessories (Optional, See Accessories tab for Details)
    • Touch Probes, Laser Sensors, Glass Platen, Software, and CPU Upgrades

Thorlabs' VideoMic® video measuring systems provide high-speed, non-contact 3-axis coordinate measurement with industry-leading accuracy. These multisensor measuring machines can easily verify critical dimensions on first articles, production samples, or entire runs. Automated inspection protocols utilize the system's large field of view and high-resolution sensors to easily inspect large volumes of parts sequentially or simultaneously. With tolerance reports and export utilities, thresholds can be set to enable timely corrections to a production process or, when necessary, interruption of production to minimize scrap. With over 1000 systems installed worldwide, each system has a long lifetime, is completely modular, and can easily scale with the demands of any quality assurance or production facility.

Seven base systems are available, each utilizing a granite, split-axis base and gantry; see the Base Systems tab for details. Item numbers beginning with VSA utilize balanced linear motors with air bearings to position each axis of travel, while item numbers beginning with VSM utilize servo-driven ground-ball-screws to position each axis of travel. Each of the three motor axes and associated encoders are bonded directly onto the granite to create a system that is extremely accurate, stable, and resistant to environmental factors.

Once a base system is selected, Thorlabs offers a wide selection of CCD cameras, zoom lenses, and lights to customize the video system to the demands of the application. For further details, see the Video Configurations tab above. A number of optional accessories are also available to increase the versatility and functionality of the system. These include Renishaw®b tactile probes; laser sensors; a hinged, pneumatic glass platen; a touch screen monitor; statistical process control software; and import/export utilities. See the Accessories tab for additional details about these options.

Please contact TMS-Sales@thorlabs.com for help selecting or customizing a base system or to inquire about other options.

  1. MetLogix is a registered trademark of MetLogix, Inc.
  2. Renishaw is a registered trademark of Renishaw plc.

Exploring the Options?

Our base systems can be customized to meet the needs of your application. If you would like a custom system, e.g. longer travel range, or would like to discuss our options, please contact me. Our team can provide system recommendations based on your needs.

Contact Us Button
Thorlabs Measurment Systems Manager
Ike Jariel
General Manager
Measurement Systems
Base System Optionsa
Base System
Item #
VSA303 VSA463 VSM463 VSA713 VSM713 VSA963 VSA1273
Stage Bearings Air Air Mechanical Air Mechanical Air Air
Stage Motors Linear Linear Servo Linear Servo Linear Linear
XY Measuring
Range
305 mm x 305 mm
(12" x 12")
460 mm x 305 mm
(18" x 12")
711 mm x 610 mm
(28" x 24")
965 mm x 760 mm
(38" x 30")
1270 mm x 915 mm
(50" x 36")
Z Measuring
Range
200 mm (8")
Typical Unit
Dimensions
  • For complete specifications, please see the Specs tab.


Click to Enlarge

A VSA713 Video CMM System with the Hood Removed
(Shown with a Subset of Video System Options and Accessories: 12X Zoom Lens System and 0.67X Extension Tube, 1.3 MP Camera, Motorized Quadrant Light, Ring Light, Profile Light, M3 Software, and a Pneumatic Glass Platen)

Base System Features

All base CMM systems utilize a split-axis gantry design wherein the Y-axis (stage) extends below a granite bridge that supports both the X and Z axes (imaging system and lights) of travel. Granite, a material commonly used in quality control and metrology departments, provides a number of advantages for long-travel stages, such as those utilized in our video CMM systems. Granite will resist changes in environmental temperature due to its low coefficient of thermal expansion; exhibits minimal warping over time, particularly over longer distances; and can be made extremely flat to create a near-ideal 2D plane. 

Small and large format systems are offered to support any application. The smallest format, offering an XY measuring range of 305 mm x 305 mm (12" x 12"), is ideal for facilities with lower volumes or smaller parts to be inspection. Our largest format, offering an XY measuring range of 1270 mm x 915 mm (50" x 36"), is designed for high-volume, high-throughput facilities with large or small parts to inspect.


Click to Enlarge

VSA Series' Non-Contact Magnetic Track Shown Above the Gold 0.10 µm Encoder 

Granite-Bonded Translator and Encoder
Each motor axis and associated encoder are bonded directly onto the granite, with the X and Z axes engineered onto the gantry and the Y axis built onto the base. This geometry reduces the amount of machined components throughout the closed-loop control system, which increases the stiffness of the system and reduces the working distance of the y-axis stage off the base and camera system off the gantry. Decreasing the working distance results in a compact design that reduces the abbe error for enhanced positioning performance.

Each axis is center-driven to reduce the influence of off-axis forces. This reduces wear and tear and improves the overall functionality of motors in each axis. When air bearings are used, a granite center guide can be seen under the y-axis stage that the air bearings float on, as shown in the image to the right. This guide must be offset to the side in order to properly center-drive the stage when using this bearing type.

Motor and Bearing Options
Base item numbers beginning with VSA utilize balanced, non-contact, magnetic linear motors with air bearings to position each axis of travel, while item numbers beginning with VSM utilize brushless, servo-driven ground-ball-screws to position each axis of travel. Both options will position the stages accurately, quietly, and quickly. 


Click to Enlarge

VSA series systems include frictionless air bearings that do not wear or require lubrication. A clean source of pressurized air or nitrogen is required.

Air bearings will not wear, do not require lubrication, and do not generate any particulates during use and thus will require less long-term maintenance. Air bearings are not recommended for unclean environments where dust, dirt, debris, or other fluids may be present. They will also require a source of clean, pressurized air or nitrogen. It is recommended to lubricate the mechanical bearings and rails periodically.


Click to Enlarge

Each control panel includes a joystick and trackball for control. The trackball provides a superior feel for smaller, precision movements.

Ergonomic Workstation Design
Each VideoMic® system includes a workstation that can be rotated or vertically adjusted for most operator heights. The workstation has a 21.5" LCD monitor, keyboard, mouse, and control panel. The control panel, shown in detail in the image to the left, includes a joystick and trackball to manually position the stage and camera, an emergency stop switch, a power button to turn the entire system on or off, two sets of three buttons to configure the actions of the joystick or trackball, and enter/ok buttons for selecting data.

Joystick and Trackball
The joystick and trackball can both be used at any time to control the motion of the stage and the camera system mounted on the gantry. When to use one or the other is operator dependent; however, the trackball is designed to minimize the signal delay between its movement and the system's response, allowing operators to have a high level of precise control over their actions. The joystick can be configured for two or three axis adjustments. If a three-axis joystick is chosen, rotating the handle left or right will translate the z-axis position of the camera assembly.

Control Buttons
A set of three equivalent control buttons are included under both the joystick and track ball. From left to right these are a Z-axis toggle, axis lock, and fine position toggle. The light under each will turn green when a specific button is active. The Z-axis toggle will switch the joystick or trackball function from X/Y to Z. If a three-axis joystick is chosen this will only affect the trackball. The axis lock button is used to toggle between single-axis linear motions. The fine position toggle reduces the responsivity of the joystick and trackball to aid in fine positioning of the system. The enter and ok buttons are used to quickly access the software controls, allowing operators to quickly select data points (measurement positions) and create inspection protocols.

Emergency Stop
This button will cut power to the entire machine and should only be used in case of emergency.

Customize Your Video System

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Contact Us Button
Thorlabs Measurment Systems Manager
Ike Jariel
General Manager
Thorlabs Measurement Systems

A customized video CMM system requires the selection of surface and/or profile lights, a camera, a zoom lens system, and a metrology software package. Click on the expandable sections below to browse all of our options to customize your system.

Thorlabs' video system inspecting a metal stamping. A motorized quadrant light was used to illuminate the surface of the stamping.

Optional Accessories

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Contact Us Button
Thorlabs Measurment Systems Manager
Ike Jariel
General Manager
Thorlabs Measurement Systems

Thorlabs' video measuring machines can be enhanced with the addition of tactile touch-trigger probes and non-contact laser probes in a single machine. This multisensor capability increases the flexibility of the system, allowing it to precisely measure and inspect the most complex parts without the need to switch systems. Our selection of accessories can be viewed by clicking on the expandable sections below.

Thorlabs video system inspecting a production item with a Renishaw® touch-trigger probe.

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Contact Us Button
Thorlabs Measurment Systems Manager
Ike Jariel
General Manager
Thorlabs Measurement Systems

Click to View Specifications:

Specifications for each of our seven base systems as well as our video system options and select accessories are available below. The most popular options are highlighted in green.

For complete details on all of the ways that Thorlabs' Optek Video Systems can be customized, please see the Video System Options and Accessories tabs or contact us using the link to the right.


Base Systems

Our Video CMM System come in five base sizes. All are available with air bearings and linear motors as a standard, except for the VSM463 and VSM713, which include ball-bearings and a servo motor. The most popular option is highlighted in green below.

VideoMic® Video Inspection Systems Specifications
Base System Item #a VSA303 VSA463 VSM463 VSA713 VSM713 VSA963 VSA1273
XYZ Control
Stage Bearings Air Air Mechanical Air Mechanical Air Air
Stage Motors Linear Linear Servo Linear Servo Linear Linear
Measurement
(Travel) Range
X-Y 305 mm x 305 mm
(12" x 12")
460 mm x 305 mm
(18" x 12")
711 mm x 610 mm
(28" x 24")
965 mm x 760 mm
(38" x 30")
1270 mm x 915 mm
(50" x 36")
Z 200 mm (8")
Accuracyb X-Y
(E2)
(1.5 + 5L/1000) µm (2.5 + 5L/1000) µm (1.5 + 5L/1000) µm (2.5 + 5L/1000) µm (1.5 + 5L/1000) µm
Z
(E1)
(1.5 + 5L/1000) µm
Velocity X-Y ≤760 mm/s
Z 150 mm/s
Repeatability Z ±3 µm (±0.00012") at High Magnification
Granite Flatness ≤0.005 mm (Over Any 700 mm Area)
Roughness Ra0.4 (Equivalent to RMS16)
Waviness ≤0.001 mm / 100 mm x 100 mm
Unit Dimensions
Footprint Width 870 mm (34") 1020 mm (40") 1270 mm (50") 1520 mm (60") 2140 mm (85")
Depth 1020 mm (40") 1020 mm (40") 1630 mm (64") 1880 mm (74") 2350 mm (93")
Total Height 1730 mm (68") 1730 mm (68") 1730 mm (68") 1860 mm (73") 1800 mm (71")
Approximate System Weight
(Crated / Uncrated)
885 kg (1950 lbs) / 590 kg (1300 lbs) 1043 kg (2300 lbs) / 726 kg (1600 lbs) 1630 kg (3600 lbs) / 1225 kg (2700 lbs) 2041 kg (4500 lbs) / 1588 kg (3500 lbs) 2994 kg (6600 lbs) / 2450 kg (5400 lbs)
Approximate Footprint Overhangc Control
Station
up to 635 mm (25")
Printer Tray up to 280 mm (11")
Top Clearance Allow for Approximately 1220 mm (48") for Servicing
Rear Clearance Allow for Approximately 610 mm (24") for Servicing
Typical Unit Dimensions
General
Operating Temperature Range 20 ± 0.5 °C (67° - 69 °F)
Rate 0.25 °C/hr (0.5 °F/hr)
Relative Humidity
(Non-Condensing)
30% - 80%
Line Voltage 115 / 230 VAC, 50 / 60 Hz, Single Phase, 1.0 kW
Air Supply
(Air Bearings Only)
Velocity 85 L/m (3 CFM)
Dry Air
- 85 L/m (3 CFM)
Dry Air
- 85 L/m (3 CFM)
Dry Air
Pressure 7 - 8.25 Bar (100 - 120 PSI) 7 - 8.25 Bar
(100 - 120 PSI)
7 - 8.25 Bar (100 - 120 PSI)
  • The base item number indicates the unit size, measurement range, and bearing/motor type of the chosen system. The magnification optics, camera, and lighting options can then be customized to suit a specific application. Contact TMS-Sales@thorlabs.com for help in selecting system options and specifications.
  • L is the point-to-point travel distance, or diagonal travel distance. This applies to a thermally stable system at 20 °C using a certified artifact, pixel value of 2 µm or less, evenly distributed load, and a standard measuring plane. 
  • The control station includes the monitor, keyboard, mouse, and control pad; it is mounted at the front of the unit. The printer tray is an optional accessory that is mounted at the rear of the unit.

CCD Cameras

Specifications for our 1.3 MP and 5 MP camera can be found below, with plots to the right showing each cameras sensitivity to wavelengths in the visible spectra. The most popular option is highlighted in green.


Click to Enlarge

5 MP Camera Response with Included IR Filter

Click to Enlarge

1.3 MP Camera Response with Included IR Filter
Camera Specifications
Resolution 1.3 MP 5 MP
Sensor Type Interline SXGA Progressive
Color CCD: ICX424AQ
Interline QSXGA Progressive
Color CCD: ICX625AQ
Pixels
(H x V)
1348 x 976 2536 x 2068
Active Pixels (H x V)
 1280 x 966 2448 x 2058
Imaging Area
(H x V)
4.8 mm x 3.6 mm 8.4 mm x 7.1 mm
Pixel Size  3.75 µm x 3.75 µm 3.45 µm x 3.45 µm
Optical Format  1/3" 2/3"
Frame Rate 40 fps 15 fps
Filter IR Cut-On Filter
Video Output Format Digital 8, 10, or 12 bit Raw Data or RGB 8 bit


Click to Enlarge

Transmission does not include an auxiliary lens or extension tube. An AR coating minimizes reflections in the visible spectra (about 400 - 700 nm).

Zoom Lenses

A zoom lens system consists of three modules: the zoom lens, an auxiliary lens, and an extension tube. Each module can be viewed in the first three columns of the below tables. Specifications of the entire three part system, including system magnification and field of view, can be found by reading horizontally across from your selection. Note that field of view is dependant on the camera format being used.

The most popular system options are highlighted in green. Please contact TMS-Sales@thorlabs.com if a telecentric zoom lens is required.

Zoom Lenses with Coaxial Light Input
Specifications for a 12X and 6.5X system with a side-mounted coaxial light input will be the same as those in the below tables, however the transmission may drop slightly due to the additional beamsplitter the light must pass though. Additionally, the 0.25X, 0.5X, and 0.75X auxiliary lenses are not compatible with this zoom lens version. The internal coaxial light will illuminate a circular area of 14 mm and 11 mm in diameter for the 12X and 6.5X zoom lenses, respectively. Any field of view (FOV) larger than these values will have darkened corners.

12X Zoom Lens System Specifications
6.5X Zoom Lens System Specifications

Objectives

Specifications for our four objectives can be found below. Please contact TMS-Sales@thorlabs.com for help configuring a system or to inquire about other options.

Item # Wavelength Range Ma WD EFL NA EA Typical Transmission OFN PFL AR Coating
Reflectance
LMUL-10X-UVB 240 - 360 nm 10X 20.0 mm 20 mm 0.25 10.0 mm Icon
Raw Data
24 95.0 mm <1.5% per Surface
(240 - 360 nm)
LMUL-20X-UVB 20X 15.3 mm 10 mm 0.36 7.2 mm Icon
Raw Data
LMUL-50X-UVB 50X 12.0 mm 4 mm 0.42 3.4 mm Icon
Raw Data
TL1X-SAPb 420 - 700 nm 1X 8.0 mm 200 mm 0.03 23.4 mm Icon
Raw Data
22 95.0 mm Ravg < 0.5%
per Surface @ 0° AOI
(420 - 700 nm)
MY5X-802 436 - 656 nm 5X 34.0 mm 40 mm 0.14 11.2 mm Transmission Icon 24 95 mm Not Available
MY10X-803 10X 34.0 mm 20 mm 0.28 11.2 mm Transmission Icon
MY20X-804 20X 20.0 mm 10 mm 0.42 8.4 mm Transmission Icon
MY50X-805 50X 13.0 mm 4 mm 0.55 4.4 mm Transmission Icon
  • When Used with a 200 mm Focal Length Tube Lens
  • Specifications are for the objective with the included wave plate attached.

M = Magnification
WD = Working Distance
EFL = Effective Focal Length

PFL = Parfocal Length
NA = Numerical Aperture
OFN = Optical Field Number




Probe Body Options
Series TP20 TP200 SP600
Sensor Type Kinematic Strain Gauge Scanning
Application Auto or Manual CMM, Suitable for Most Applications Auto or Manual CMM with High Accuracy High-Speed, Contact Form Scanning and Fast Point Measurement Applications
Renishaw Stylus Range
M2 Threaded M2 Threaded M3 Threaded
Module Changing Racks Manual and Motorized

Renishaw® Tactile Probes

Thorlabs' video systems are compatible with most Renishaw TP20 and TP200 series 3-axis, touch-trigger probes and SP600 series 3-axis scanning probes. These are sold as a kit that is preconfigured onto the video system. Each kit includes a probe body, probe module, and an optional manual or motorized module changing rack. 

Specifications for a selection of Renishaw's probe modules can be found below. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular option is highlighted in green.

TP20 Series Probe Options and Specificationsa
Module Sense Direction Pre-Travel
Variation
Unidirectional
Repeatability
Trigger Force (N)
(Stylus Lengtha)
Overtravel Force (N)
(Stylus Lengtha)
Overtravel
Displacement
Repeatability of
Stylus Changing
XYb Z XY +Z -Z XY (deg.) +Z (mm) -Z (mm)
Low Force (LF) ±X, ±Y, +Z ±0.60 µm ±0.35 µm 0.055 0.65 0.09 1.15 N/A ±14 3.1 N/A Motorized: ±0.50 μm
Manual: ±1.0 μm
Standard Force (SF) ±0.80 µm ±0.35 µm 0.08 0.75 0.2 - 0.3 3.5 N/A ±14 4 N/A
Medium Force (MF)
±1.00 µm ±0.50 µm 0.10
(25 mm)
1.9
(25 mm)
0.2 - 0.4
(25 mm)
7
(25 mm)
N/A ±14 3.7 N/A
Extended Force (EF) ±2.00 µm ±0.65 µm 0.10
(50 mm)
3.2
(50 mm)
0.2 - 0.5
(50 mm)
10
(50 mm)
N/A ±14 2.4 N/A
6 Way (6W) ±X, ±Y, ±Z ±1.50 µm ±1.00 µm 0.14 1.60 0.25 2.5 9 ±14 4.5 1.5
  • For stylus lengths of 10 mm, unless stated otherwise, and velocities of 480 mm/min.
  • Low Force Direction
TP200 Series Probe Options and Specifications
Module Sense
Direction
Unidirectional
Repeatability
XY Form
Measurement Deviation
XYZ Form
Measurement Deviation
Trigger Force (N) Overtravel Forcea (N) Repeatability of
Stylus Changing
Trigger 1 Trigger 2 Trigger 1 Trigger 2 Trigger 1 Trigger 2 XYb Z XY Z
Low Force (LF) ±X, ±Y, ±Z ±0.40 µm ±0.50 µm ±0.80 µm ±0.90 µm ±1 µm ±1.4 µm 0.02 0.07 0.1 - 0.15 1.6 Motorized: ±0.50 μm
Manual: ±1.0 μm
Standard Force (SF) 0.2 - 0.4 4.9
Extended Overtravel (EO)
0.2 - 0.4 4.9
  • At a displacement of 0.50 mm.
  • Low Force Direction
SP600 Series Scanning Probe Options and Specifications
Module Sense Direction Measurement Range Overtravel Range Resolution Spring Rate Damping
SP600 ±X, ±Y, ±Z ±1 mma X, Y and -Z Protected by
Kinematic Joint.
0.1 µm - 1 µm 120 gmf/mm in X, Y, Z
(Nominal)
20% in X,Y,Z
(Typical)
  • In All Axes and Orientations with a 50 mm long, 4.6 g Stylus.

Laser Sensors

The Conoscopic Holography Laser Sensor utilizes interchangeable objectives at the output port that determine the measuring range of the sensor. Two of the more popular objectives are specified below; other options are available if the application requires it. The Triangulation Displacement Sensor does not use an objective, and is selected based on its measurement range. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular options are highlighted in green.

Triangulation Displacement Sensor Specifications
Measuring Range 25 mm 50 mm
Measuring Range Spread Start (SMR) 25 mm 35 mm
Mid (MMR) 27.5 mm 60 mm
End (EMR) 50 mm 85 mm
Linearityb ≤ ±0.08% ≤ ±0.08%
Repeatability at Measuring Rate   1 µm 2 µm
Measuring Rate 2 kHz
Spot Diameter (±10%) SMR 100 x 140 µm 90 x 120 µm
MMR 120 x 130 µm 230 x 240 µm
EMR 390 x 500 µm 630 x 820 µm
Minimum 55 x 50 µm 70 x 65 µm
Laser Power < 1 mW
Laser Color Red (670 nm)
Laser Safety Class Class 2 in Accordance with
DIN EN 60825-1 : 2008-05
  • Other measurement ranges are available. Please contact TMS-Sales@thorlabs.com to inquire about other options.
  • Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.
Conoscopic Holography Sensor Specifications
Included Objective
Effective Focal Lengtha
25 mm 50 mm
Measuring Range 1.8 mm 8 mm
Standoff 14 mm 44 mm
Linearityb ±0.17% ±0.08%
Repeatability 0.06 µm 0.10 µm
X Laser Spot Size 27 µm 37 µm
Angular Coverage 150° 170°
Measurement Frequency ≤3000 Hz
Color Red
Laser Safety Class Class 2, IEC 60825-1:2007c
Compatible Software IK500
  • The objective is interchangeable and other objectives are available. Please contact
    TMS-Sales@thorlabs.com to inquire about other options.
  • Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.
  • Complies with 31CFR 1040.10 and 1040.11 Class II - FDA

Posted Comments:
No Comments Posted