Single-Axis Flexure Translation Stages: 5 mm Travel


  • Differential Adjusters
  • Optional 20 μm Piezo Drive for Open- or Closed-Loop Operation
  • Mounting Plate & Angle Bracket Accessories

NFL5DP20S

Shown with NFL5P1 Baseplate (Not Included)

NFL5P2

Angle Bracket

NFL5P1

Base Plate

Typical XZ
Configuration

Related Items


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Key Specificationsa
Item # NFL5D(/M) NFL5DP20(/M) NFL5DP20S(/M)
Actuator(s) Differential
Micrometer
Diff. Micrometer &
Open-Loop Piezo
Diff. Micrometer &
Closed-Loop Piezo
Coarse Adjuster Travel 5 mm (0.20")
Coarse Adjuster Resolution 0.5 mm per Revolution
Fine Adjuster Travel 300 µm
Fine Adjuster Resolution 50 µm per Revolution
Load Capacity Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Piezo Travel N/A 20 µm 20 µm
Piezo Resolution
(Theoretical)
N/A 0.6 nm 0.6 nmb
Piezo Voltage N/A 0 - 75 V 0 - 75 V
  • Refer to the Specs tab for complete specifications, including compatible controllers.
  • Closed-Loop Operation Using Strain Gauge Position Sensor
Single-Axis Flexure Stage Selection Guide
1.5 mm Travel
5 mm Travel

Features

  • Differential Adjuster Translation Range: 5 mm
  • Optional 20 μm Piezo Drive
    • NFL5DP20(/M): Open-Loop Operation
    • NFL5DP20S(/M): Strain Gauge for Closed-Loop Operation
  • Compact Size: 3.00" (75 mm) Square, 1.18" (30 mm) Thick
  • XYZ-Configurable

When stability is of the utmost importance, the NanoFlex™ 5 mm travel single-axis compound flexure stages provide ultra-smooth translation for applications that are intolerant to the errors inherent in linear bearings. The compound linear symmetrical flexure design ensures true linear motion with zero cross talk over the full range of translation. This is achieved without the use of parts that require controlled contact to maintain their function; all the motion results from the flexing of various structural components within the translator. These features provide uncompromised performance, even when used in harsh environments.

These stages can be stacked in a 2-axis or 3-axis configuration using the optional base plate NFL5P1(/M) and angle bracket NFL5P2(/M) described below. A 3 m long SMC to SMC piezo drive cable is supplied with the open-loop and closed-loop piezo versions. The closed-loop NFL5DP20S(/M) also includes a 3 m long LEMO to D-Type feedback cable (Item # PAA622). See the Pin Diagrams tab for connector details.

Item # NFL5D(/M) NFL5DP20(/M) NFL5DP20S(/M)
Stage Specifications
Manual Travel Range 5 mm (0.20") 5 mm (0.20") 5 mm (0.20")
Maximum Stage Load Capacity Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Stage Mounting Surface Dimensions 75 mm x 75 mm (2.95" x 2.95") 75 mm x 75 mm (2.95" x 2.95") 75 mm x 75 mm (2.95" x 2.95")
Stage Height 30 mm (1.18") 30 mm (1.18") 30 mm (1.18")
Manual Drive Specifications
Drive Type Differential Micrometer Differential Micrometer Differential Micrometer
Coarse Adjustment Pitch 0.5 mm 0.5 mm 0.5 mm
Fine Adjustment Range 300 µm 300 µm 300 µm
Fine Adjustment Pitch 50 µm 50 µm 50 µm
Piezo Specifications
Voltage N/A 0 to 75 V 0 to 75 V
Position Sensor for Closed-Loop Operation N/A N/A Strain Gauge
Travel Range N/A 20 µm 20 µm
Theoretical Resolution N/A 0.6 nma 0.6 nmb (Closed-Loop Operation)
Capacitance N/A 3.6 µF 3.6 µF
Connector N/A Male SMC Male SMC
Feedback Connector N/A N/A Male 7 Pin LEMO
Cable Length N/A SMC to SMC: 3 m (9.84') SMC to SMC: 3 m (9.84')
LEMO to D-Type: 3 m (9.84')
Compatible Controllers N/A MDT694BMPZ601, or KPC101 BPC301, MPZ601, or KPC101
  • When Driven by the MDT694B, MPZ601, or KPC101 Controllers
  • When Driven by the BPC301, MPZ601, or KPC101 Controllers

Piezo Drive Input

NFL5DP20(/M) and NFL5DP20S(/M)

SMC Male

SMA Male

Nominal maximum input voltage: 75 V
Absolute maximum input voltage: 100 V

Pin Designation
1 Bridge
2 +15 V
3 -15 V
4 0 V
5 Signal
6 0 V
7 Identification
8 Not Connected
9 Not Connected

Displacement Sensor

NFL5DP20S(/M) Only

9 Pin D-Type Male (Feedback Cable)

LEMO Male

7 Pin LEMO Male (Stage)

LEMO Male


Posted Comments:
matthew balestier  (posted 2024-10-28 15:50:44.507)
What is the stiffness of the stage/actuator? What is the resonant frequency under no load? Thank you!
dnewnham  (posted 2024-11-13 05:23:06.0)
Thank you for your inquiry I will reach out directly to discuss your application with you
Jose Mejia  (posted 2024-03-14 08:11:35.53)
Hello, We are currently using the NFL5DP20S/M in our setup. We used it in the closep loop configuration, while in the closed loop we move the coarse adjustment micrometer and it produced a sound. After that open loop worked fine but closed loop jumps from 75V to -14V as we move the dial. How could we solve this issue?
Louis Eaton  (posted 2024-03-06 09:28:09.86)
Hello, I am currently trying to drive a NFL5DP20/M with a MDT694A and am trying to troubleshoot an issue where it seems as if the pizeo stage is getting stuck at certain voltages, suppling with a higher causes the stage to jolt forward forward to some degree resulting in an audible click. This happens at multiple voltages within the travel range. Just wondering if there's any likely causes for this issue or any quick fixes. Thanks!
spolineni  (posted 2024-03-11 12:42:31.0)
Thank you for reaching out to us. I am sorry to hear the issue caused with NFL5DP20/M and MDT694A. We will need to delve into a few more details to fully understand this issue. Please be assured that I will personally contact you to aid in resolving this issue.
LJ Z  (posted 2023-10-25 09:20:36.813)
Hi, I wonder if the NFL5D/M can be used in high vacuum environment, say E-4 or -5 pascal.
do'neill  (posted 2023-10-30 11:38:32.0)
Response from Daniel at Thorlabs. The NFL5D/M is made of black anodised aluminium and will therefore outgas significantly in a high vacuum. I will reach out to you directly to discuss your application.
Gabrialla Hou  (posted 2023-06-15 16:26:46.623)
您好,我购买了压电位移台NFL5DP20/M和对应的压电控制器KPZ101,下载了运动控制软件Kinesis版本。Kinesis上控制只是对应了电压,也就是0-75V,给不同的电压,位移台会移动,0-75V电压对应的移动距离是20 µm吗?它和电压的关系是线性的吗?
fguzman  (posted 2023-06-22 07:29:53.0)
Thanks for your enquiry. A member of our local team (techsupport-cn@thorlabs.com) will contact you to further discuss your application.
user  (posted 2022-08-11 12:07:41.143)
What is the resonant frequency of the NFL5DP20S?
Xing Lin  (posted 2021-03-13 16:44:41.733)
We bought NFL5DP20S, KPZ101 and KSG101. What is the accuracy of position readings from KSG101? Also, what is the on-axis accuracy if the whole system is operated in close-loop mode?
DJayasuriya  (posted 2021-03-19 05:43:49.0)
Thank you for you inquiry. We will get in touch with you directly to discuss your application further.
Leslie Deck  (posted 2020-10-22 16:43:35.1)
Can the NFL5D be upgraded later with a PZT drive?
DJayasuriya  (posted 2020-10-23 10:39:06.0)
thank you for your inquiry. Yes the NFL5D can be upgrade to a NFL5DP20 (5 mm Travel Translation Stage with Diff. Drive and 20 µm Piezo Actuator). Please get in touch with your local tech support team if you require this change, they will be happy to arrange it.
user  (posted 2020-08-31 13:03:36.61)
Does the horizontal load also allow a PULL force (i.e. mounted upside down with a hanging load)?
DJayasuriya  (posted 2020-09-02 03:51:05.0)
Thank you for your inquiry. The load capacity when mounted upside down should be lower than the 0.5 kg that we spec for the upright configuration. The limiting factor is the spring force and the flexure.
DJayasuriya  (posted 2020-09-02 03:51:05.0)
Thank you for your inquiry. The load capacity when mounted upside down should be lower than the 0.5 kg that we spec for the upright configuration. The limiting factor is the spring force and the flexure.
DJayasuriya  (posted 2020-09-02 03:51:05.0)
Thank you for your inquiry. The load capacity when mounted upside down should be lower than the 0.5 kg that we spec for the upright configuration. The limiting factor is the spring force and the flexure.
David Hoffman  (posted 2020-08-08 18:19:05.157)
Hello, What is the rms position fluctuation in the closed loop operation? Also what is the repeatability of the position command? Thank you
DJayasuriya  (posted 2020-08-21 09:31:52.0)
Thank you for your inquiry. The position fluctuations when used with closed loop is in the nano meter range theoretically (< 1 nm). The repeatability is similar to our Max stages 30 nm over 30 µm, 0.1 % over full travel range.
user  (posted 2020-05-25 06:10:53.02)
Hello. Is there any recommended direction when I use this stage vertically? In the usage picture, I can find its handle is upright. Can I put the handle downside?
DJayasuriya  (posted 2020-05-26 05:11:41.0)
Thank you for your inquiry. Yes you would be able to change the orientation of how the stage is mounted.
user  (posted 2019-12-19 17:07:03.207)
Hi, Probably a silly question. If I set the two micrometers, then how stable are they afterwards ? Will they drift while I use the piezo drive ? Is it possible to lock the micrometers to stop any drift ? Thanks !
cwright  (posted 2020-01-06 03:44:03.0)
Response from Charles at Thorlabs: Hello and thank you for contacting us. The micrometer on the NFL5DP20/M can be locked by use of a small thumbscrew but only for the course adjustment. The fine adjustment can not be locked on these devices. Unfortunately we do not have any data regarding drift of the micrometer during piezo operation but we would expect only thermal drift to be a factor.
ab177  (posted 2018-02-08 18:33:33.537)
Hello, I am assembling a multi-stack of translation stages where each has limited load capacity. Could you please tell me what is the weight of the NFL5DP20? Thanks, Art.
tfrisch  (posted 2018-02-09 04:22:39.0)
Hello, thank you for contacting Thorlabs. We list the weight in the drawing as 0.38kg. I will reach out to you to discuss this application.
chiwen.cheng  (posted 2017-09-25 17:43:03.733)
We have bought the NFL5DP20S/M and KPZ101. How could we get the relationship between voltage and displacement of Piezo? Do we need another strain gauge (KSG101) to read the real/absolute position? Many thanks
AManickavasagam  (posted 2017-09-26 05:38:12.0)
Response from Arunthathi at Thorlabs: Thank you for your question. Due to hysteresis you will not be able to achieve the Piezo versus displacement relationship. Hence you will need to buy the KSG101 which will measure the position accurately using the inbuilt strain gauge. Thanks.
jp  (posted 2014-06-16 15:31:43.27)
Hello, this is Junsong from Royal Institute of Technology, Sweden. How is the relationship between the voltage and the displacement of the Piezo? Is there a equation? For my experiment, I need to know the equation between them. Thanks very much.
rcapehorn  (posted 2014-06-17 11:32:34.0)
Response from Rob at Thorlabs: Thank you for your question. Due to the inherent nature of piezos having a hysteresis motion, the absolute position cannot be found from the voltage input. To achieve position information you would need to use one of the closed loop versions that uses a strain gauge, NFL5DP20S. I have emailed you with more details if you require.
dbcole  (posted 2014-03-07 10:03:24.203)
We’re looking to purchase this bundle and had a couple of questions. I’m not a piezo expert, so please forgive my incomplete knowledge. Can the piezo be driven by a sinusoidal signal in order to modulate the position sinusoidally? And if so, is there a maximum drive frequency? Also, can the device displacement be changed in a unidirectional manner over its 20um range at a given linear velocity?
cdaly  (posted 2014-03-07 11:52:42.0)
Response from Chris at Thorlabs: Thank you for your feedback. Yes, the piezo can be driven with a sinusoidal voltage in order to modulate the displacement, but this will require an input from a 0-10 V analog source such as a function generator or a DAQ card. The maximum frequency would depend on the depth of modulation required (peak to peak voltage) and the capacitance of the stage. For instance, if you were to modulate over the full 150 V (20 um) range of the stage, the maximum frequency would be roughly 8.8 Hz, This can be found using the equation f=I/(pi*V*C), where I is the max current for the controller (7.5mA), V is the voltage range of modulation and C is the capacitance of the stage (1800nF). This value may also be affected by the load present on the stage as well. The displacement of a piezo is inherently mostly linear, but there will be some deviation.
jlow  (posted 2012-12-13 09:27:00.0)
Response from Jeremy at Thorlabs: Unfortunately this is not possible on the NFL5D. The reason for this is because of the way this stage is designed (it does not have the typical barrel mount). If you are looking for a long travel piezo stage, how about adding on our PAS or PAZ series piezo actuator to our LNR50 series stages? You can find these at http://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=2295.
lbassett  (posted 2012-12-07 20:23:24.58)
Is it possible to replace the differential adjuster on the NFL5D with a longer-travel piezo actuator such as the DRV181 (80µm) or PAS015 (100µm)?
Greg  (posted 2009-01-26 11:31:06.0)
Response from Greg at Thorlabs to melsscal: Thank you for taking the time to ask us questions via our website. The PAA100 is a suitable cable for the piezo driver (SMC), while the PAA622 is the strain gauge cable (LEMO). The TPZNF5 (/M) and TSGNF5 (/M) come with the NF5P1 (/M) mounting plate. The T-Cubes come with mounting plates as well. I updated the webpage to clear this up. Also, the bundles are now detailed in tabs so that they are easier to learn about.
melsscal  (posted 2009-01-17 09:21:54.0)
Does the TSGNF5/M COMES WITH/INCLUDES THREE BASE PLATE LIKE NF5P2 - ONE EACH FOR NF5DP20S 5mm Travel Stage, TPZ001 Piezo Driver & TSG001 Strain Gauge Reader ?
melsscal  (posted 2009-01-17 08:25:03.0)
waht are the cables part no. which comes along with TSGN5/M as standard accessory ?we want to buy same extra as spare along with TSGN5/M.
melsscal  (posted 2009-01-17 08:16:26.0)
What are the part nos. of the suitable cables for SMC & LEMO ports of this stage ?

Manual Linear Translation Stages

Thorlabs' manual translation stages are offered in a range of maximum travel distances, from less than 1/4" (6 mm) to 2" (50 mm) and longer for our long travel, large area platforms. Many of these stages can be ordered in multi-axis configurations, providing XY or XYZ translation. For fiber coupling applications, please see our Multi-Axis Stages, which offer finer adjustment than our standard manual translation stages. In addition to linear translation stages, we offer rotation stages, pitch and yaw platforms, and goniometers. We also offer motorized translation stages that are powered by DC Servo motors, stepper motors, or direct drive technology.

Crossed-Roller Bearing Stages

These linear translation stages feature crossed-roller bearing travel mechanisms for precision motion, high load capacity, and low angular deviation. The LNR Series stages feature all-steel body construction, while the LX, XRN, and XR Series stage bodies are constructed of cast tool and jig aluminum. We also offer several vertical crossed-roller bearing stages (see below).

Crossed-Roller Bearing Stages
Product Family LNR Series 25 mm Stages LX Series 25 mm
Stages
XRN Series 25 mm Stages XR Series 25 mm Stages XR Series 50 mm Stages LNR Series 50.8 mm Stages
Click Photo
to Enlarge
Travel 25 mm (0.98") 25 mm (0.98") 25 mm (0.98") 25 mm (0.98") 50 mm (1.97") 50.8 mm (2")
Drive Type Multiple Micrometer Micrometer Micrometer Micrometer Multiple
Platform Size 2.34" x 2.36"
(59.4 mm x 60.0 mm)
2.56" x 2.56"
(65.0 mm x 65.0 mm)
2.00" x 3.35"
(50.7 mm x 85.0 mm)
2.98" x 4.33"
(75.7 mm x 110.0 mm)
2.98" x 5.51"
(75.7 mm x 140.0 mm)
3.94" x 3.94"
(100.0 mm x 100.0 mm)
Possible Axis
Configurations
X, XZ, XY, XYZ X, XY, XZ, YZ, XYZ X, Y, Z, XY, XZ, YZ, XYZ X, Y, Z, XY, XZ, YZ, XYZ X, Y, Z, XY, XZ, YZ, XYZ X, XY, XYZ
Additional Details

Ball Bearing Stages

These translation stages feature hardened steel linear bearings for precise motion and long life. They are available with a variety of actuators and in single-axis or preassembled multi-axis configurations.

Ball Bearing Stages
Product Family MS Series 1/4" Stages T12 Series 1/2" Stages MT Series 1/2" Stages PT Series 1" Stages LT Series 2" Stages
Click Photo to Enlarge
Travel 1/4" (6.4 mm) 1/2" (12.7 mm) 1/2" (12.7 mm) 1" (25.4 mm) 2" (50 mm)
Drive Type Multiple Thumbscrew Multiple Multiple Differential Micrometer
Platform Size 1.17" x 1.17"
(29.7 mm x 29.7 mm)
0.76" x 0.81"
(19.3 mm x 20.6 mm)
2.40" x 2.41"
(61.0 mm x 61.2 mm)
3.00" x 4.00"
(76.2 mm x 101.6 mm)
3.75" x 3.75"
(95.3 mm x 95.3 mm)
Possible Axis Configurations X, XY, XYZ X, XY, XYZ X, XY, XYZ X, XY, XYZ X, XY, XYZ
Additional Details

Dovetail Stages

These compact stages incorporate dovetails and a leadscrew for the translation mechanism. They are suitable in general purpose motion control applications.

Dovetail Stages
Product Family DT Series 1/2" Stages DTS Series 1" Stages
(Vacuum-Compatible Version Available)
DTS Series 2" Stage
Click Photo to Enlarge
Travel 1/2" (12.7 mm) 1" (25 mm) 2" (50 mm)
Drive Type Thumbscrew Thumbscrew Thumbscrew
Platform Size 1.00" x 1.00" (25.4 mm x 25.4 mm) 2.68" x 2.95" (68.0 mm 75.0 mm) 2.68" x 3.74" (68.0 mm x 95.0 mm)
Possible Axis Configurations X, XY, XYZ X, XY, XYZa X, XY, XYZ
Additional Details
  • The DTSA03 anodized angle bracket designed for XYZ configurations may also be used with the DTS25V(/M) vacuum-compatible stages; however, the DTSA03 is not vacuum-compatible.
  • The 1" (25 mm) travel DTS Series features an anodized DTS25(/M) stage and a DTS25V(/M) stage that is vacuum-compatible down to 10-6 Torr.

Flexure Stages

Thorlabs' Nanoflex™ translation stages feature frictionless flexure mechanisms for improved positioning and resolution when compared to similar stages made using bearings. The translation of the stage is accomplished by the elastic deformation (flexing) of a linkage attached to the mounting platform. Most models also include piezo actuators for small position adjustments.

Flexure Stages
Product Family Nanoflex™ 1.5 mm Stage Nanoflex™ 5 mm Stages
Click Photo to Enlarge
Travel 1.5 mm (0.06") + 25 µm Piezo 5 mm (0.20") 5 mm (0.20") + 20 µm Piezo
Drive Type Thumbscrew and Piezo Actuator Differential Micrometer Differential Micrometer and
Open-Loop Piezo Actuator
Differential Micrometer and
Closed-Loop Piezo Actuator
Platform Size 1.18" x 1.18" (30.0 mm x 30.0 mm) 2.95" x 2.95" (75.0 mm x 75.0 mm)
Possible Axis Configurations X, XY, XYZ X, XY, XYZ X, XY, XYZ X, XY, XYZ
Additional Details

Vertical Stages

We offer vertical translation stages with crossed-roller bearings for precise motion as well as long travel vertical stages for heavy-duty applications.

Vertical Stages
Product Family XRN Series 9 mm Vertical Stage XR Series 14 mm Vertical Stage MVS Series 1/2" Vertical Stage MVS Series 1" Vertical Stage VAP Series 4" Vertical Stage VAP Series 10" Vertical Stage
Click Photo to Enlarge
Travel 9.0 mm (0.35") 14.0 mm (0.55") 1/2" (13.0 mm) 1" (25.0 mm) 4" (101.6 mm) 10" (254 mm)
Drive Type Worm-Gear Driven Lift Screw Micrometer Adjuster Knob and Coarse Manual Positioning
Platform Size 2.00" x 2.00"
(50.7 mm x 50.7 mm)
2.98" x 2.98"
(75.7 mm x 75.7 mm)
2.36" x 2.36" (60.0 mm x 60.0 mm) 3.00" x 6.00" (76.2 mm 152.4 mm)
Additional Details

Motorized Linear Translation Stages

Thorlabs' motorized linear translation stages are offered in a range of maximum travel distances, from a stage with 20 µm of piezo translation to our 600 mm direct drive stage. Many of these stages can be assembled in multi-axis configurations, providing XY or XYZ translation. For fiber coupling applications, please see our multi-axis stages, which offer finer adjustment than our standard motorized translation stages. In addition to motorized linear translation stages, we offer motorized rotation stages and goniometers. We also offer manual translation stages.

Piezo Stages

These stages incorporate piezoelectric elements in a variety of drive mechanisms. ORIC® stages incorporate piezo inertia drives that use "stick-slip" friction properties to obtain extended travel ranges. Our Nanoflex™ translation stages use standard piezo chips along with manual actuators. Elliptec® stages use resonant piezo motors to push and pull the moving platform through resonant elliptical motion. Our LPS710E z-axis stage features a mechanically amplified piezo design and includes a matched controller.

Piezoelectric Stages
Product Family ORIC®
PDXZ1 Closed-Loop
4.5 mm Vertical Stage
ORIC®
PD2 Open-Loop
5 mm Stage
ORIC®
PDX2 Closed-Loop
5 mm Stage
Click Photo
to Enlarge
Travel 4.5 mm 5 mm
Speed 1 mm/s (Typ.)a 10 mm/s (Typ. Max)b 8 mm/s (Typ.)c
Drive Type Piezoelectric Inertia Drive
Possible Axis Configurations Z X, XY, XYZ
Mounting
Surface Size
45.0 mm x 42.0 mm 13 mm x 13 mm
Additional Details
  • Specified at 20 kHz Driving Frequency and in Closed-Loop Mode
  • Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.
  • Specified using PDXC and PDXC2 Benchtop Controllers.

Piezoelectric Stages
Product Family ORIC®
PD1 Open-Loop
20 mm Stage
ORIC®
PD1D Open-Loop
20 mm Monolithic XY Stage
ORIC®
PDX1 Closed-Loop
20 mm Stage
ORIC®
PDX1A Closed-Loop
20 mm Stage Low-Profile
ORIC®
PD3 Open-Loop
50 mm Stage
Click Photo
to Enlarge
Travel 20 mm 50 mm
Speed 3 mm/s (Typ. Max)a 20 mm/s (Typ. Max)c 10 mm/s (Typ.)b 10 mm/sd
Drive Type Piezoelectric Inertia Drive
Possible Axis Configurations X, XY, XYZ XY, XYZ X, XY, XYZ X, XY, XYZ X, XY, XYZ
Mounting
Surface Size
30 mm x 30 mm 80 mm x 30 mm
Additional Details
  • Specified using KIM101 K-Cube Controller.
  • Specified at 20 kHz driving frequency and in closed-loop mode.
  • Specified using PDXC and PDXC2 Benchtop Controllers.
  • Specified using PDXC and PDXC2 Benchtop Controllers. For performance when controlled with a KIM001 or KIM101 K-Cube Controller, see the Specs tab of the PD2 or PD3 stage presentation.

Piezoelectric Stages
Product Family Nanoflex™
20 µm Stage
with 5 mm Actuator
Nanoflex™
25 µm Stage
with 1.5 mm Actuator
Elliptec® 28 mm Stage Elliptec® 60 mm Stage LPS710E 1.1 mm Vertical Stage
Click Photo
to Enlarge
Travel 20 µm + 5 mm Manual 25 µm + 1.5 mm Manual 28 mm 60.0 mm 1.1 mm
Maximum Velocity - 180 mm/s 90 mm/s -
Drive Type Piezo with Manual Actuator Resonant Piezoelectric Motor Amplified Piezo
Possible Axis Configurations X, XY, XYZ X Z
Mounting Surface Size 75 mm x 75 mm 30 mm x 30 mm 15 mm x 15 mm 21 mm x 21 mm
Additional Details

Stepper Motor Stages

These translation stages feature removable or integrated stepper motors and long travel ranges up to 300 mm. Many of these stages either have integrated multi-axis capability (PLSXY) or can be assembled into multi-axis configurations (PLSX, LNR Series, NRT Series, and LTS Series stages). The MLJ150 stage also offers high load capacity vertical translation.

Stepper Motor Stages
Product Family PLSX with and without PLST(/M) Top Plate
1" Stage
PLSXY with and without PLST(/M) Top Plate
1" Stage
LNR Series
25 mm Stage
LNR Series
50 mm Stage
Click Photo
to Enlarge
Travel 1" 25 mm 50 mm
Maximum Velocity 7.0 mm/s 2.0 mm/s 50 mm/s
Possible Axis
Configurations
X, XY X, XY, XYZ X, XY, XYZ
Mounting
Surface Size
3" x 3" 60 mm x 60 mm 100 mm x 100 mm
Additional Details

Stepper Motor Stages
Product Family NRT Series
100 mm Stage
NRT Series
150 mm Stage
LTS Series
150 mm Stage
LTS Series
300 mm Stage
MLJ250
50 mm Vertical Stage
Click Photo
to Enlarge
Travel 100 mm 150 mm 150 mm 300 mm 50 mm
Maximum Velocity 30 mm/s 50 mm/s 3.0 mm/s
Possible Axis
Configurations
X, XY, XYZ X, XY, XYZ Z
Mounting
Surface Size
84 mm x 84 mm 100 mm x 90 mm 148 mm x 131 mm
Additional Details

DC Servo Motor Stages

Thorlabs offers linear translation stages with removable or integrated DC servo motors. These stages feature low profiles and many can be assembled in multi-axis configurations.

DC Servo Motor Stages
Product Family MT Series
12 mm Stages
PT Series
25 mm Stages
MTS Series
25 mm Stage
MTS Series
50 mm Stage
Click Photo
to Enlarge
Travel 12 mm 25 mm 25 mm 50 mm
Maximum Velocity 2.6 mm/s 2.4 mm/s
Possible Axis Configurations X, XY, XYZ X, XY, XYZ
Mounting
Surface Size
61 mm x 61 mm 101.6 mm x 76.2 mm 43 mm x 43 mm
Additional Details
DC Servo Motor Stages
Product Family M30 Series
30 mm Stage
M30 Series
30 mm Monolithic
XY Stage
M150 Series
150 mm XY Stage
KVS30
30 mm Vertical Stage
Click Photo
to Enlarge
Travel 30 mm 150 mm 30 mm
Maximum Velocity 2.4 mm/s X-Axis: 170 mm/s
Y-Axis: 230 mm/s
8.0 mm/s
Possible Axis Configurations X, Z XY, XZ XY Z
Mounting
Surface Size
115 mm x 115 mm 272.4 mm x 272.4 mm  116.2 mm x 116.2 mm
Additional Details

Direct Drive Stages

These low-profile stages feature integrated brushless DC servo motors for high speed translation with zero backlash. When no power is applied, the platforms of these stages have very little inertia and are virtually free running. Hence these stages may not be suitable for applications where the stage's platform needs to remain in a set position when the power is off. We do not recommend mounting these stages vertically.

Direct Drive Stages
Product Family DDS Series
50 mm Stage
DDS Series
100 mm Stage
DDS Series
220 mm Stage
DDS Series
300 mm Stage
DDS Series
600 mm Stage
Click Photo
to Enlarge
Travel 50 mm 100 mm 220 mm 300 mm 600 mm
Maximum Velocity 500 mm/s 300 mm/s 400 mm/s 400 mm/s
Possible Axis Configurations X, XY X, XY X X
Mounting Surface Size 60 mm x 52 mm 88 mm x 88 mm 120 mm x 120 mm
Additional Details
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Single-Axis Flexure Stages: 5 mm Travel

The stages are supplied with a differential micrometer drive, which provides coarse and fine adjustment. An optional piezo drive is available, with or without strain gauge feedback for closed- and open-loop operation, respectively. The NFL5 series stage is ideal for a variety of applications, including interferometry, microscopy, and other precision nanopositioning applications.

See the Specs tab above for more detailed information, including compatible controllers.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available
NFL5D Support Documentation
NFL5DNanoFlex™ 5 mm Travel Translation Stage with Differential Drive, Imperial
$940.84
3-5 Days
NFL5DP20 Support Documentation
NFL5DP20NanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and 20 µm Piezo Actuator, Imperial
$1,145.15
3-5 Days
NFL5DP20S Support Documentation
NFL5DP20SNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and Closed-Loop 20 µm Piezo Actuator, Imperial
$1,543.11
3-5 Days
+1 Qty Docs Part Number - Metric Price Available
NFL5D/M Support Documentation
NFL5D/MNanoFlex™ 5 mm Travel Translation Stage with Differential Drive, Metric
$940.84
3-5 Days
NFL5DP20/M Support Documentation
NFL5DP20/MNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and 20 µm Piezo Actuator, Metric
$1,145.15
3-5 Days
NFL5DP20S/M Support Documentation
NFL5DP20S/MNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and Closed-Loop 20 µm Piezo Actuator, Metric
$1,543.11
3-5 Days
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NFL5 Series Mounting Adapters

The NFL5P1 and NFL5P2 are adapter plates designed for the NFL5 Series of translation stages. The NFL5P1 is a universal base plate with slots on the side that enable obstruction-free mounting onto an optical breadboard. This base is ideal for XY or XYZ multi-axis configurations where the standard counterbores in the middle of the stages are obstructed.

The NFL5P2 is an angle bracket that allows a NFL5 Series stage to be mounted vertically in 2-axis and 3-axis configurations.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available
NFL5P1 Support Documentation
NFL5P1NanoFlex™ NFL5D Series Base Plate
$55.83
3-5 Days
NFL5P2 Support Documentation
NFL5P2NanoFlex™ NFL5D Series Angle Bracket
$115.23
3-5 Days
+1 Qty Docs Part Number - Metric Price Available
NFL5P1/M Support Documentation
NFL5P1/MNanoFlex™ NFL5D Series Base Plate, Metric Taps
$55.83
3-5 Days
NFL5P2/M Support Documentation
NFL5P2/MNanoFlex™ NFL5D Series Angle Bracket, Metric Taps
$115.23
3 Weeks